University of Alberta

Micralyne Inc.

Alberta Microelectronic Corporation

Kevin John Robbie

Michael Julian Brett

A thin film microstructure is formed from a substrate having a film of vapor deposited material extending in distinct helical columns from the substrate. The distinct helical columns may terminate distally from the substrate in a region of denser material forming a cap for the helical columns. The cap and substrate may be each connected, respectively, to first and second electrodes, and may operate in conjunction with an acoustic wave sensor.

Shadow sculpted thin films

A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. Angle of incidence, measured from the normal to the surface of the substrate, exceeds 80.degree.. Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern.

Growing community of inventors

Linkoping, Sweden

Kevin John Robbie