Setra Systems, Inc.

Brooks Automation Us, LLC

Kevin Bourbeau

Eric Christopher Beishline

Anthony T Batista

Gino Amaro Pinto

Joseph Hallisey

Been-Chyuan Lin

Tiago Braz Anes

Alexander G Krupyshev

Christopher A Bussiere

Sunil Barot

Emilien Joseph Claude Auderbrand

Michael J Amirto

Benjamin F Fontaine

Shawn Oscar Henry

Bernard A Manning, Ii

Paul Francis Grosshart

Brandon Thomas Rogers

Emilien Audebrand

A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.

Substrate processing apparatus

A substrate transport apparatus having a drive section and at least one articulated multi-link arm having an upper arm joined at one end to the drive section and a forearm joined to the upper arm. The upper arm being a substantially rigid unarticulated link. Dual end effector links that are separate and distinct from each other are each rotatably and separately joined to a common end of the forearm about a common axis of rotation. Each end effector link has at least one holding station. The holding station of at least one end effector link includes one holding station at opposite ends of the at least one end effector link that is substantially rigid and unarticulated between the opposite ends, and the holding station at one of the opposite ends is substantially coplanar with the holding station of each other end effector link.

A room condition monitor (RCM) that includes a processor with an embedded router software object that is in signal communication with a first communication connector including BACnet/IP interface for the transmission receipt of data packages over a building management system (BMS) communication network according to a BACnet/IP protocol. The RCM also includes a room condition sensor for detecting a room condition. In addition, the RCM includes a projected capacitive LCD screen display to display information regarding the detected room condition, or other building information associated with the BMS. A second communication connector with a second network protocol interface is provided for communication with network legacy devises through the RCM router.

Room condition monitoring system

A pressure sensor () useful as a vacuum manometer. A reference pressure cavity () of the sensor is evacuated through an evacuation opening () located behind a plate portion () of the sensor electrode () having a non-planar surface for supporting the diaphragm () during an overpressure event. The electrode is hermetically sealed to the body () of the sensor by a brazed joint with a ceramic seal member () disposed there between. The brazed joint may include a layer of buffer material () which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry () by a wire having a spring section (), thereby providing a stress free interconnection.

Pressure measuring instrument

A surface mounted instrument () that is easily installed to seal () against a mounting surface () in spite of imprecise installation of a standard rough-in box () or irregularities in the surface. A cover plate () overlays the installed instrument housing () without the use of outwardly visible mechanical connectors by use of a pawl () that engages the housing. An oversized display () is mounted for easy replacement on a moveable display module () for unobstructed access to the interior () of the housing. Subsurface channels () formed in the housing are used to deliver a working fluid from a measured location to a sensor () inside the housing.

Surface mounted instrument

An environmental condition monitor () configured for simple upgrade from analog signal output to any of a plurality of digital communication protocols. A display board () includes the analog signal acquisition and processing elements of the device and also includes a pre-positioned but initially inoperative digital communication output connector (). A connector board () associated with the display board includes a connector () to which any one of a plurality of digital communication boards () may be selectively connected, depending upon which of a plurality of digital communication protocols is desired. Selective connection of a digital communication board completes a circuit whereby an analog output signal is converted to the desired digital output format and is then communicated back to the now-activated digital communication output connector ().

Environmental condition monitor for alternative communication protocols

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Pepperell, MA, United States of America

Kevin Bourbeau