Massachusetts Institute of Technology

Kerry Cheung

Akintunde Ibitayo Akinwande

Luis Fernando Velásquez-García

A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field.

Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics

A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field. A plurality of voltage sources provide a r.f. and d.c. signal to the electrodes for generating the quadrupole field. An auxiliary voltage source applies an auxiliary drive signal to the r.f. and d.c. signal to create new stability boundaries within the standard Mathieu stability regions with high-resolution around operating conditions where there are approximately no higher-order resonances.

Growing community of inventors

Cambridge, MA, United States of America

Kerry Cheung