Samsung Electronics Co., Ltd.

Keonho Lee

Byeongsang Kim

Wooram Kim

Kyungwon Yun

Taehyoung Lee

Sangil Im

Sung Chai Kim

Namyoung Cho

A method of inspecting a semiconductor processing chamber includes providing a vision sensor into the semiconductor processing chamber, aligning the vision sensor on a target in the semiconductor processing chamber, obtaining an object image of the target using an image scanning module of the vision sensor, generating a three dimensional model of the target based on the object image, and obtaining a physical quantity of the target from the three dimensional model. The obtaining of the object image of the target includes projecting a pattern onto the target using an illuminator of the image scanning module, and scanning an image of the target in which the pattern is projected, using a camera of the image scanning module.

Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the same

Growing community of inventors

Hwaseong-si, South Korea

Keonho Lee