Korea Advanced Institute of Science and Technology

Keong-Su Lim

Sang-Su Kim

Duk-Young Jeon

Chang-Hyun Lee

Apparatus for a photo-induced process are provided, which implement a transparent film (instead of an optical window), to reduce light absorption loss that would result from use of an optical window. A photo-induced process apparatus eliminates problems of conventional systems which use optical windows, such as blurring an optical window and the surface of a light source, photo absorption loss due to the optical window and/or a purge cleaning gas, and dust generation by a moving part such as a flexible curtain. A photo-induced process apparatus efficiently utilizes light emitted from a light source.

Apparatus and method for photo-induced process

A photocathode structure having a photoelectric face plate protective layer, in order to prevent a photoelectric effect from being deteriorated sharply due to a high reaction of oxygen with respect to most of existing photoelectric face plate materials when the photoelectric face plate used for generating photoelectrons by a photoelectric effect is exposed to the atmosphere, is provided. For example, a diamond-like carbon thin layer is used as a photocathode protective layer, to thereby perform a function of protection of the photoelectric face plate through isolation of the photoelectric face plate from the atmosphere and enable electrons generated from the photoelectric face plate to pass through a diamond-like carbon thin layer, which is deposited thinly, by the tunneling effect so that the performance of the photocathode is not affected. By using the protective layer, the processes subsequent to the photoelectric face plate deposition process can be freely performed in the atmosphere, to thereby simplify the whole process. As a result, a production cost is lowered, and manufacturing of a device or apparatus using a large-are photocathode is facilitated.

Growing community of inventors

Daejeon, South Korea

Keong-Su Lim