Hitachi Electronics Engineering Co., Ltd.

Kenya Wada

Hisayoshi Ichikawa

Kazuto Kinoshita

Hiroshi Fukuda

Takahisa Ishida

Kazuhiko Gommori

Shinji Sugizaki

Nobuo Morita

Kazuhiko Gonmori

A lamp house is located face to face with a substrate which is transferred by a conveyer means. A dielectric barrier discharge lamp is provided in the lamp house to irradiate the substrate with ultraviolet light, while a moistened inert gas, consisting of an inert gas and water vapor, is supplied to a space between the substrate and the dielectric barrier discharge lamp from a moistened inert gas generating means. Under irradiation of ultraviolet light from the dielectric barrier discharge lamp, water vapor in the moistened inert gas is split into a reducing active member &lsqb;H&middot;&rsqb; and an oxidative active member &lsqb;&middot;OH&rsqb;.

Apparatus and method for processing a substrate

Method and apparatus for a disk texturing operation in which laser pulses are successively bombarded against a delimited surface area on the face of a rotating disk, from an optical laser pulse irradiating means which is put in movement in a radial direction relative to the disk to provide a textured zone of a predetermined width on the disk. A pulsed laser beam from a laser light source is adjusted to an optimum power level for an aimed bump diameter. The laser beam is then transformed into an annular beam of a collimated light flux having specified inner and outer diameters, and the resulting laser pulses are successively bombarded on the texturing zone through an objective optical system condensing said laser pulses into a specified spot diameter thereby to form minute bumps of predetermined shape and diameter uniformly on the surface of the disk.

Method and apparatus for laser-texturing disk surfaces

An apparatus for forming a textured zone in a predetermined surface area on a magnetic data recording disc, which is capable of precisely controlling the position and range of the texturing zone. Bumps 4 are formed on a CSS zone on the inner peripheral side of a magnetic recording disc 1 by the use of a spindle means 6 and a laser beam bombarding means 7. The spindle means 6 is provided with a chuck mechanism 13 with opposingly confronting tapered surfaces 18a and 21a to hold a disc 1 in a centered position in alignment with the rotational axis of a spindle shaft 10. On the other hand, the laser beam bombarding means 7 has part of component parts of its optical system, from a laser energy source 34 up to an electromagnetic shutter 39, mounted on its main casing 7a, and has a reflector mirror 40 and an objective lens 41 accommodated in a movable housing 31 which is movable in the direction of its optical axis to displace a laser spot position on the surface of the disc 1 in a radial direction thereof.

Apparatus for texturing magnetic data recording disc surfaces

Method and apparatus for processing substrates through a number of wet treatments. A substrate is set on a substrate rotating means for rotation in a horizontal face-up position, within a housing which is open on its top side. By a treating liquid feed means having a treating liquid feed nozzle member, at least one kind of treating liquid is supplied onto upper surfaces of the substrate being rotated by the substrate rotating means. The treating liquid feed nozzle member is supported on a movable arm for displacement to and from an operative position vertically confronting the substrate and a receded standby position away from the substrate on the substrate rotating means. Located face to face with lower surfaces of the substrate is a nozzle means which supplies a fluid to the lower side of the substrate.

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Ninomiya-machi, Japan

Kenya Wada