Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Canon Anelva Corporation (2 from 356 patents)
2 patents:
1. 11694882 - Substrate processing apparatus and substrate processing method
2. 11270873 - Substrate processing apparatus and substrate processing method