Horiba, Ltd.

Kentaro Nishikata

Satoshi Ohashi

Yutaka Saijo

Takashi Komatsubara

Shigeru Kakinuma

Junichi Aoyama

The X-ray analyzer repeats scanning of a sample by an electron beam from an electron gun (beam source), detects a characteristic X-ray from the sample by an X-ray detector, generates an element distribution image of the sample by a signal processor every scanning, and stores a plurality of element distribution images in a sequential order. Temporal changes of the element distribution image of the sample are obtained. Moreover, by moving a stage by a moving unit concurrently with the scanning, an element distribution image of the sample where the scanning position is varied is obtained. By generating the element distribution image while varying the scanning position, positioning of the range where the element distribution image is to be obtained on the sample can be quickly performed based on the element distribution image itself.

X-ray analyzer

An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column partthat converges the electron beams EB, and a light collecting mirror partthat is arranged between the electron optical column partand the sample W and that has an energy beam pathto pass the electron beams EB converged by the electron optical column partand to irradiate the electron beams EB on the sample W and a mirror facewhose focal point F is set on an axis of the energy beam pathand that collects the light L generated from the sample W by means of the mirror face, wherein the light collecting mirror partis supported by the electron optical column partso that the axis of the electron beams EB coincides with the focal point F.

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Kyoto, Japan

Kentaro Nishikata