Tokyo Electron Limited

Kentaro Joma

Tatsuya Ogi

In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.

Growing community of inventors

San Jose, CA, United States of America

Kentaro Joma