Toshiba Kikai Kabushiki Kaisha

Kentaro Ishibashi

Mitsunori Kokubo

Hiroshi Goto

Hiroshi Okuyama

Yukio Iimura

Masakazu Kanemoto

A micropattern is joined to a substrate (W) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.

Method of forming micropattern, die formed by this method of forming micropattern, transfer method and micropattern forming method using this die

A transfer apparatus includes a table on which a molding material is placed, a mold holding body that fixes and holds a mold disposed such as to be opposed to a surface of the table, a gimbal member which holds the mold holding body and which forms a convex spherical surface portion, a gimbal member formed with a concave spherical surface portion which is opposed and in contact with the convex spherical surface portion, a movable body that holds the gimbal member and which can advance and retreat in the vertical direction with respect to the table surface, and an attitude adjusting/holding unit that adjusts and holds attitude of the gimbal member.

Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus

A transcript apparatus having a tablehaving a placement surface on which a forming materialis placed; a die holderdisposed in opposition to the table, to fixedly hold a transcription diea first gimbal memberhaving one side to hold the die holder body and the other side formed with a convex spherical surface, a second gimbal memberformed with a concave spherical surface facing the convex spherical surface, the gimbal mechanism guiding ultraviolet rays therein; a movable bodyholding the second gimbal member, that is movable in a vertical direction to the placement surface; attitude adjustment and holder means to adjust and hold an attitude of the first gimbal member; and an ultraviolet ray path to guide ultraviolet rays emitted from an ultraviolet ray generatoronto the forming material through the transcription die.

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Shizuoka-ken, Japan

Kentaro Ishibashi