Hitachi High-tech Corporation

Kenta Yaegashi

Yoshisada Ebata

Takanori Aono

Shigeru Matsui

Isao Uchida

Jiro Yamamoto

The present invention provides a concave diffraction grating and an optical device using the concave diffraction grating, the concave diffraction grating being capable of preventing deformation of a reflection film due to the influence of temperature, and preventing deterioration in optical characteristic due to temperature. This concave diffraction grating is provided with: a reflection film () having a plurality of grating grooves (); a holding film () comprising metal and having one surface on which the reflection film () is provided; a concave substrate () having a concave surface (); and an affixing layer () provided between the concave surface () and the other surface of the holding film (), and affixing the holding film () and the reflection film () to the concave substrate ().

Concave diffraction grating and optical device

An objective of the present invention is to improve a diffraction grating. A molding member including a substrate and a resist pattern having a surface shape including grooves is prepared. The grooves include bottom portions BPand top portions TPthat are alternately repeated in an X direction, and that each extend in a Y direction. The bottom portions adjacent to each other have an interval that changes stepwise. Next, a metal film is formed on a surface of the resist pattern to cover the grooves, and then the metal film is peeled off from the molding member. As a result, the metal film is formed to have a surface shape reverse to the surface shape of the resist pattern is formed. Top portions TPand bottom portions BPof the metal film correspond to bottom portions BPand top portions TPof the resist pattern respectively.

Diffraction grating, method for manufacturing diffraction grating, and photomask

Easy and accurate mating of a groove interval of a groove pattern of a diffraction grating with a position on a convex fixing substrate is enabled. For this purpose, a concave diffraction grating is fabricated by: transferring a groove pattern formed on a plane diffraction grating and having unequal groove intervals onto a metal thin film; forming a first alignment mark on a convex surface of a fixing substrate having the convex surface to fix the metal thin film; mating a second alignment mark formed on an adhesive surface of the metal thin film with the first alignment mark to perform alignment; bonding the adhesive surface of the metal thin film and the convex surface of the fixing substrate to each other to fabricate a master; and transferring a groove pattern of a metal thin film of the master.

Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same

The present invention provides a concave diffraction grating capable of improved diffraction efficiency by suppressing spherical aberration. The concave diffraction grating is a concave diffraction gratingfor dispersing and focusing light and comprises sawtooth grating grooveson a concave substrate, with the sawtooth grating groovesbeing unequally spaced. The concave diffraction gratingfor dispersing and focusing light is formed by preparing a planar diffraction grating with a sawtooth shape which is formed on a planar substrate by photo-lithography and etching or machining and which forms unequally spaced grating grooves, deforming and mounting the planar diffraction grating along a fixed convex substrate to obtain a mold of a concave diffraction grating, and transferring the mold of the concave diffraction grating to the surface of a metal or a resin.

Growing community of inventors

Tokyo, Japan

Kenta Yaegashi