Kabushiki Kaisha Toshiba

Kenta Takanashi

Hiroshi Ohno

Hideaki Okano

Hiroya Kano

Takahiro Kamikawa

According to one embodiment, an optical inspection method includes projecting first pattern light in a first basic modulation mode that periodically changes in bright and dark, onto an object, acquiring a first image by capturing an image of the object onto which the first pattern light has been projected, projecting second pattern light in a first inverted modulation mode in which bright and dark are inverted with respect to the first basic modulation mode, onto the object, acquiring a second image by capturing an image of the object onto which the second pattern light has been projected, and generating a singular light-scattered image in which a singular region including uniquely-scattered light that is extracted based at least on the first image and the second image is intensified.

Growing community of inventors

Kawasaki Kanagawa, Japan

Kenta Takanashi