Steering Solutions IP Holding Corporation

Hitachi High-tech Corporation

Senju Metal Industry Co., Ltd.

Kenta Nakajima

Eduardo R Mondragon-Parra

Toru Ito

Yoko Kurasawa

Hiroaki Iseki

Fumiyoshi Ofuji

A plasma processing method for uniformly removing a processing target film in a lateral direction even when a depth of a trench is increased, in particular, a method for plasma-etching a tungsten film of a stacked film formed by alternately stacking an insulating film and the tungsten film. The method includes: a first depositing step of depositing a film; a first etching step of etching after the first depositing step; a second depositing step of depositing a film; a second etching step of etching using a mixed gas after the second depositing step; and a third etching step of etching after the second etching step, the second depositing step being performed after the first depositing step and the first etching step are repeated a predetermined number of times, and the second depositing step, the second etching step, and the third etching step are repeated a predetermined number of times.

Plasma processing method

A flux according to the present invention contains a rosin methyl ester in which the flux is a solid or solid-like flux at 25° C., and is used for an inside of a flux-cored solder or an exterior of a flux-coated solder.

Flux, flux-cored solder using flux, flux-coated solder using flux and soldering method

A tripot universal joint includes a first rotatable shaft member having a longitudinal axis and three longitudinal guide channels, each having two opposing concave side surfaces and a back surface. The joint also includes a rotatable second shaft member having a longitudinal axis and comprising a spider having three radially extending trunnions equally, each of the trunnions having a convex outer surface disposed within an associated longitudinal guide channel. The joint further includes three rotatable ball assemblies, each disposed on a convex outer surface of a trunnion, each ball assembly having an outer ball with a convex outer surface that is disposed within the concave side surfaces of the longitudinal guide channel with which it is associated for moveable engagement within the channel and an inner ball with an inner surface that is rotatably disposed on the convex surface of the trunnion with a detachably reattachable coupling.

Constant velocity joint having over-articulation protection

A tripot universal joint includes a first rotatable shaft member having a first longitudinal axis and three longitudinal guide channels disposed parallel to the first longitudinal axis, each having two opposing concave side surfaces and a back surface. The joint also includes a rotatable second shaft member having a second longitudinal axis and comprising a spider having three radially extending trunnions equally, each of the trunnions having a convex outer surface disposed within an associated longitudinal guide channel. The joint further includes three rotatable rollers, each rotatably disposed on a convex outer surface of a respective trunnion, each roller having a convex outer surface that is configured for disposition within the concave side surfaces of the longitudinal guide channel with which it is associated for moveable engagement within the channel and an inner surface that is rotatably disposed on the convex surface of the trunnion.

Growing community of inventors

Tokyo, Japan

Kenta Nakajima