Furuya Metal Co., Ltd.

Tokyo Electron Limited

Kensuke Morita

Shoji Saito

Tomoaki Miyazawa

Tomohiro Maruko

Tatsuya Yamaguchi

Koji Yoshii

Hisashi Inoue

Yasuaki Kikuchi

Masahiro Kobayashi

Yuya Okawa

Yoshiteru Arai

Jun Itabashi

A thermocouple structure according to one aspect of the present disclosure includes a first element wire, second element wires formed of a material different from the first element wire, an insulating covering member covering at least one of the first element wire and the second element wires, and a protective tube accommodating the first element wire and the second element wire. Each of the second element wires is bonded to a different position on the first element wire.

Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure

A thermocouple capable of preventing a decrease in strength of a temperature measuring junction portion while maintaining temperature responsiveness and productivity in comparison with a conventional thermocouple. A thermocouple including two wires and a clamping member, the clamping member clamping the two wires while distal end portions of the wires being in contact with each other in parallel to provide a temperature measuring junction portion, in which when it is assumed that diameters of the two wires are d1 and d2 (where d1&#x2265;d2) respectively; a length of the temperature measuring junction portion in a longitudinal direction of the two wires is L; a maximum width of the temperature measuring junction portion in a parallel direction of the two wires is D; and a maximum width in a direction orthogonal to the parallel direction in a cross section of the temperature measuring junction portion is E, the following equations are satisfied:0.5&#xd7;(1+2)&#x2264;&#x2264;5&#xd7;(1+2)&#x2003;&#x2003;Equation (1)1&#xd7;(1+2)&#x3c;&#x2264;5&#xd7;(1+2)&#x2003;&#x2003;Equation (2)1.4&#xd7;1&#x3c;&#x2264;8&#xd7;1.&#x2003;&#x2003;Equation (3)

Thermocouple

A platinum wire in which crystal grain growth is slowed in order to prevent damage caused by creep without dispersing a metal oxide, and occurrence of slip at crystal grain boundaries is slowed. A platinum thermocouple wire that is used in a negative electrode of a platinum-based thermocouple and has a nitrogen mass concentration of 10 to 100 ppm, and when structure observation of the cross section of the wire in a longitudinal direction is performed, a structure is observed in which there is a plurality of crystal grains, which have an aspect ratio {(length of major axis)/(length of minor axis perpendicular to major axis)} of 5 or more and elongate in the longitudinal direction of the wire, in a wire thickness direction.

Platinum thermocouple wire

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Tokyo, Japan

Kensuke Morita