Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sokudo Co., Ltd. (1 from 58 patents)
2. Screen Semiconductor Solutions Co., Ltd. (1 from 49 patents)
2 patents:
1. 9728434 - Substrate processing apparatus, storage device, and method of transporting substrate storing container
2. 8827621 - Substrate processing apparatus, storage device, and method of transporting substrate storing container