Xradia, Inc.

Other

Laser Analytics, Inc.

Kenneth W Nill

Wenbing Yun

Yuxin Wang

James N Walpole

Srivatsan Seshadri

David L Wall

Arlan W Mantz

Jack F Butler

Richard S Eng

Dudley M Chapman

CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (&#x2dc;12&#xd7;, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.

CD-GISAXS system and method

An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used. This enhances the preferential imaging of the zone plate lens because its diffraction efficiency (percent of incident energy diffracted into the focus) changes rapidly near an absorption line and can be made to peak at the X-ray fluorescence line of the element from which it is fabricated. In another embodiment, a spectral filter, such as a multilayer optic or crystal, is used in the optical train to achieve preferential imaging in a fluorescence microscope employing either a chromatic or an achromatic lens.

Element-specific X-ray fluorescence microscope and method of operation

A semiconductor optical amplification system that uses a single-mode fiber angle-coupled to a semiconductor wave-guide medium with optical gain. This design is particularly simple and relevant to optical fiber systems, but it may be generalized to include other implementations as well, in which other spatial mode filters are employed. A chip design is employed in which lowest order mode has a size greater than about 5 micrometers (&#x3bc;m). Thus, much smaller facet angles can be employed while still avoiding self-oscillation. More specifically, according to some aspects of the invention, facet angles of less than 4 to 5 degrees are utilized.

Large modal volume semiconductor laser system with spatial mode filter

A lithography apparatus having achromatic Fresnel objective (AFO) that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The lithography apparatus allows the use of short wavelength radiation in the 1-15 nm spectral range to print high resolution features as small as 20 nm.

Achromatic fresnel optics based lithography for short wavelength electromagnetic radiations

A semiconductor optical amplification system that uses a single-mode fiber angle-coupled to a semiconductor wave-guide medium with optical gain. This design is particularly simple and relevant to optical fiber systems, but it may be generalized to include other implementations as well, in which other spatial mode filters are employed. A chip design is employed in which lowest order mode has a size greater than about 5 micrometers (&mgr;m). Thus, much smaller facet angles can be employed while still avoiding self-oscillation. More specifically, according to some aspects of the invention, facet angles of less than 4 to 5 degrees are utilized.

A scanning spectrometer incorporating a scanning diode laser powered with a controllable injection current. The injection current control may be set at predetermined discrete levels. These levels may be varied in accordance with signals derived from a servo loop, and may have superimposed upon them a cyclically varying substantially constant amplitude current. The laser output is directed via a beam splitter to both sample and reference cells. The material in the reference cell is so selected as to provide absorption features at each of the desired frequencies. The cyclically varying current is provided with an amplitude sufficient to cause a frequency amplitude at least as great as the maximum breadth of each of these spectral features of interest. The preselected bias currents are selected so as to provide lasing action of the diode at or near each of the selected frequencies. A phase-locked amplifier tuned to the frequency of the cyclically varying current senses the position of the scanned laser output relative to that of the associated absorption feature and provides an error signal to adjust the bias current so as to center the cyclically scanned laser frequency on the selected absorption feature.

Scanning laser spectrometer

Radiating mirror lasers in which a semiconductor active element containing an appropriately fabricated heterostructure configuration is formed as one end mirror of a two-mirror resonant cavity. The active element is fabricated from an alloy semiconductor compound such a lead salt alloy, the bandgap of which may be varied by varying the relative composition of its constituents. By properly selecting the compound and its composition, lasers may be made for operation at wavelengths that span the ultraviolet, visible and infrared portions of the spectrum. The lasers combine the inherently high power characteristics of a radiating mirror structure with a wide spectral coverage. Arrangements are disclosed for increasing power efficiencies, for tuning the operating wavelength over a wide range and for otherwise improving the utility of the lasers.

Growing community of inventors

Lexington, MA, United States of America

Kenneth W Nill