Advanced Energy Industries, Inc.

Veeco Instruments Inc.

Kenneth W Finley

Hendrik Walde

Michael John Zolock

Brian Lee

David J Christie

Skip B Larson

Doug Pelleymounter

Kenneth E Nauman, Jr

This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.

Adjustable non-dissipative voltage boosting snubber network

Charge removal from electrodes in unipolar sputtering system

Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltages

Differing boost voltages applied to two or more anodeless electrodes for plasma processing

Methods and apparatus for applying pulsed DC power to a plasma processing chamber are disclosed. In some implementations, frequency of the applied power is varied to achieve desired processing effects such as deposition rate, arc rate, and film characteristics. In addition, a method and apparatus are disclosed that utilize a relatively high potential during a reverse-potential portion of a particular cycle to mitigate possible nodule formation on the target. The relative durations of the reverse-potential portion, a sputtering portion, and a recovery portion of the cycle are adjustable to effectuate desired processing effects.

Methods and apparatus for applying periodic voltage using direct current

A process control apparatus including an actuator configured to effect changes in an industrial process, a power supply, a plurality of current switches coupled between the actuator and the power supply and a controller coupled to the plurality of current switches. The controller is configured to selectively close one or more of the plurality of current switches so as to provide a selectable level of current from the power supply to the actuator. In variations, a plurality of discharge switches are coupled to the actuator and the controller is configured to selectively close the discharge switches so as to provide a selectable level of charge to discharge from the actuator.

System and method for driving an industrial control device

Energy efficient circuitry is provided for rapid transfer of charge to and from a reactive load while avoiding excessive peak currents and significant resistive energy dissipation. For example, circuitry of the invention provides for rapid actuation of a piezoelectric mass flow valve actuator while significantly reducing electrical input power and power dissipation requirements. The invention also features circuitry for recovering a substantial portion of the energy delivered to the reactive load while still permitting rapid cycling of the load drive circuit. Controlling the activation interval of the drive circuitry provides for incremental actuation or positioning of the reactive load.

Reactive load resonant drive circuit

An RF matching network includes a switching element that quickly switching between a first matching sub-network and a second matching sub-network, such that the impedance of neither sub-network is coupled to the other when selected by the switch. In one embodiment, the switching element includes a bipolar transistor, a TRIAC device and a PIN diode. The PIN diode conducts or attenuates the RF signal depending on its bias voltage. The bipolar transistor controls the bias voltage on the PIN diode. The TRIAC device protects the bipolar transistor damage that can be caused from high voltages generated at the PIN diode when the PIN diode is not conducting the RF signal.

Growing community of inventors

Fort Collins, CO, United States of America

Kenneth W Finley