New Sd, Inc.

Bei-systron Donner

Kenneth S Lewallen

Bert David Egley

G Richard Newell

Scott D Orlosky

Accelerometer and method in which parts such as the seismic mass and force sensors are all fabricated of a single material such as crystalline quartz and bonded together in a manner which reduces the possibility of creep between them. Damping plates and squeeze film gas damping dampen movement of the seismic mass, and the parts are oriented in a predetermined manner relative to the crystallographic axes of the wafers from which they are fabricated to control the character of breakaway tabs which hold the parts to the wafers during fabrication.

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Concord, CA, United States of America

Kenneth S Lewallen