Applied Materials, Inc.

Kenneth S Ledford

Ludovic Godet

Visweswaren Sivaramakrishnan

Daihua Zhang

Kazuya Daito

Kang Luo

Mahendran Chidambaram

Bahubali S Upadhye

Hemantha Raju

Alexey Stepanov

Elsa Massonneau

John Rusconi

Michael David-Scott Kemp

Embodiments described herein provide substrate support assemblies for retaining a surface of a substrate having one or more devices disposed on one or more surfaces of the substrate without contacting the one or more devices and preventing changes in profile of the substrate. The substrate support assembly allows for control of the substrate. The substrate support assembly includes a gas nozzle disposed through a body of the substrate support assembly. The gas nozzle provides a gas to the substrate. The gas is operable to provide pressure to the substrate to reduce contact on the substrate and to control the profile of the substrate.

Using controlled gas pressure for backside wafer support

Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.

Inkjet platform for fabrication of optical films and structures

Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.

Multifunctional printhead service station with multi-axis motions

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San Jose, CA, United States of America

Kenneth S Ledford