Applied Materials, Inc.

Kenneth Reese Reynolds

Joseph Yudovsky

Avi Tepman

Dan A Marohl

Hui W Chen

Steve G Ghanayem

Gary C Ettinger

Alexander S Polyak

Younes Achkire

Haochuan Zhang

Christopher Heung-Gyun Lee

John S Hearne

Terry Kin-Ting Ko

Lidia Vereen

Peter N Skarpelos

Brian J Downum

Patrick Williams

Daniel Hachnochi

A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

Scrubber box and methods for using the same

Scrubber box

A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.

Flexible polishing fluid delivery system

Growing community of inventors

Los Gatos, CA, United States of America

Kenneth Reese Reynolds