University of California

The United States of America As Represented by the United States

Euv Llc.

Kenneth L Blaedel

Pete J Davis

Charles S Landram

Daniel M Makowiecki

Nicholas J Colella

John A Kerns

Paul Andrew Spence

Samuel L Thompson

Robert S Juntz

A method and apparatus are described wherein a thin layer of complaint material is deposited on the surface of a chuck to mitigate the deformation that an entrapped particle might cause in the part, such as a mask or a wafer, that is clamped to the chuck. The harder particle will embed into the softer layer as the clamping pressure is applied. The material composing the thin layer could be a metal or a polymer for vacuum or electrostatic chucks. It may be deposited in various patterns to affect an interrupted surface, such as that of a &ldquo;pin&rdquo; chuck, thereby reducing the probability of entrapping a particle.

Compliant layer chucking surface

A saw having a self-pumped hydrodynamic blade guide or bearing for retaining the saw blade in a centered position in the saw kerf (width of cut made by the saw). The hydrodynamic blade guide or bearing utilizes pockets or grooves incorporated into the sides of the blade. The saw kerf in the workpiece provides the guide or bearing stator surface. Both sides of the blade entrain cutting fluid as the blade enters the kerf in the workpiece, and the trapped fluid provides pressure between the blade and the workpiece as an inverse function of the gap between the blade surface and the workpiece surface. If the blade wanders from the center of the kerf, then one gap will increase and one gap will decrease and the consequent pressure difference between the two sides of the blade will cause the blade to re-center itself in the kerf. Saws using the hydrodynamic blade guide or bearing have particular application in slicing slabs from boules of single crystal materials, for example, as well as for cutting other difficult to saw materials such as ceramics, glass, and brittle composite materials.

Method for maintaining a cutting blade centered in a kerf

Hydrodynamic blade guide

A reusable grinding tool consisting of a replaceable single layer of abrasive particles intimately bonded to a precisely configured tool substrate, and a process for manufacturing the grinding tool. The tool substrate may be ceramic or metal and the abrasive particles are preferably diamond, but may be cubic boron nitride. The manufacturing process involves: coating a configured tool substrate with layers of metals, such as titanium, copper and titanium, by physical vapor deposition (PVD); applying the abrasive particles to the coated surface by a slurry technique; and brazing the abrasive particles to the tool substrate by alloying the metal layers. The precision control of the composition and thickness of the metal layers enables the bonding of a single layer or several layers of micron size abrasive particles to the tool surface. By the incorporation of an easily dissolved metal layer in the composition such allows the removal and replacement of the abrasive particles, thereby providing a process for replenishing a precisely machined grinding tool with fine abrasive particles, thus greatly reducing costs as compared to replacing expensive grinding tools.

Precision replenishable grinding tool and manufacturing process

An apparatus for metering fluids at high pressures of about 20,000 to 60,000 psi is disclosed. The apparatus includes first and second plates which are positioned adjacent each other to form a valve chamber. The plates are made of materials which have substantially equal elastic properties. One plate has a planar surface area, and the other a recessed surface area defined by periphery and central lips. When the two plates are positioned in adjacent contacting relationship, a valve chamber is formed between the planar surface area and the recessed surface area. Fluid is introduced into the chamber and exits therefrom when a deformation occurs at positions where they no longer form a valve seat. This permits the metering of fluids at high pressures and at slow variable rates. Fluid then exits from the chamber until an applied external force becomes large enough to bring the valve seats back into contact.

Flow metering valve

Growing community of inventors

Dublin, CA, United States of America

Kenneth L Blaedel