Phase Metrics, Inc.

Veeco Instruments Inc.

Veeco Tucson Inc.

Kenneth H Womack

Christopher A Lacey

Carlos A Duran

L Allan Butler

Peter C Jann

Wayne W Li

Michael Hermann Wahl

Semyon Nodelman

George A Burt, Jr

Vlastimil Cejna

Carlos A Dur&aacute;n

Igor Iosilevsky

Phillip Gregory Roberts

Daniel Lee Abraham

Ed Ross

The present invention provides a method and apparatus for high-speed autofocus and tilt of an inspection surface in a microscope system. The method and apparatus herein described projects an array of spots, lines, circles, grids or other shapes on the surface to be adjusted. The superposition of the array on the surface is imaged by a CCD camera and captured for subsequent analysis. Analysis of the captured image determines both the distance and angle through which the surface must be adjusted to bring it into the focal plane of the optical system. Focus and tilt error is estimated by comparing image dilation and distortion with calibrated data.

High speed autofocus and tilt for an optical imaging system

The present invention provides a method and apparatus for high precision image metrology. A feature dimension from the image is determined by measuring corresponding features in the Fourier power spectrum of the image with substantially improved precision due to immunity from noise and system response. Operationally, a digital image of the sample is acquired at sufficient resolution to capture the feature of interest. A sample widow is chosen which substantially isolates the feature of interest. The feature window is then piecewise extended to a predetermined window size for effective Fourier Transform interpolation. A Fourier Power Spectrum of the sample widow is generated at high sample density such that the loci of extremal points indicative of a feature dimension is identified with high precision. The relative spacing of the extremal points is measured and related to the desired feature dimension. Utilizing the power spectrum of the image feature in the manner herein disclosed advantageously provides a way to measure feature dimensions with high precision. The method of the present invention is substantially independent of variations in image system performance, typical system noise and sample optical properties.

High precision optical metrology using frequency domain interpolation

An apparatus that can measure a space between a first surface and a second surface such as the air bearing between a slider and a disk. The apparatus may include a light source that can reflect a light beam from the slider and the disk. By way of example, the light beam can be reflected off of an Al,O,cap of a slider. A birefringent element such as a Savart plate may split the reflected light beam into an ordinary beam and an extraordinary beam. The ordinary and extraordinary beams may combine to form an interference pattern that is detected by a photodetector. A controller receives data from the photodetector. The apparatus may have a mechanism which can vary a phase between the ordinary and extraordinary beams so that the controller can calculate a phase value &phgr;. The controller then computes the space from the phase value &phgr;. The variation in phase between the beams may be created by tilting the birefringent element, or moving the reflected light beam directed into the birefringent element. The apparatus can determine the space without performing a retract calibration routine that moves the slider as is required in the prior art.

Apparatus for measuring a small gap using a Savart plate

A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.

Apparatus and method for surface inspection by specular interferometric

A non-contact optical method and apparatus for use in inspecting and measuring defects on a disk. The apparatus generates an interference pattern from a reference beam reflected from a surface of a transparent slider with a second beam reflected from a surface of a test disk. The resulting interference pattern is processed by a set of photodetectors and processing electronics to quantify and map the location and magnitude of asperities on the disk.

Non-contact optical glide tester

A calibration medium that is used to calibrate a flying height tester which measures the gap of an air bearing formed between a magnetic recording head and a substrate. The medium contains a first ridge and a second ridge that extend from an underlying substrate. The ridges may be coated with a reflective material. A flying height tester can be calibrated by measuring light reflected from each ridge. The ridges have varying thicknesses so that the calibration medium will produce multiple data points.

Thin film flying height calibration disk for calibrating flying height

An apparatus and method for measuring the space between a transparent member such as a substrate, and reflective member such as a slider. The apparatus includes a first optical system which detects a first light beam that is reflected from the substrate and the slider. The reflected light is separated into four separate beams. The intensities of the beams are detected and utilized to determine a first stokes parameter, a second stokes parameter, a third stokes parameter and a fourth stokes parameter of the reflected light. The stokes parameters are used to compute the real index of refraction n, extinction coefficient k and the thickness of the space. The four stokes parameters account for any depolarized light that is reflected from the slider. The first optical system may have a photodetector which detects an image of the slider. The image provides multiple data points that can be used to calculate n, k and the thickness of the air gap without a retract routine. The apparatus may also have a second optical system which detects a second light beam reflected from the substrate and the slider. The second optical system can be used to dynamically measure a thickness of the space. In the combined system the first optical system may accurately measure the n and k of a slider area while the second optical system dynamically measures the thickness of the air gap.

Combined interferometer/ellipsometer for measuring small spacings

An apparatus and method for optically measuring the air gap between a transparent glass disk and an air bearing slider without separately measuring the real index of refraction n and extinction coefficient k of the slider using an external ellipsometer. The phase offset required to compute the air gap is computed from a measurement of the air slider reflectivity and from an empirically derived equation that correlates the index of refraction with the reflectance of the slider. The apparatus includes a light source for directing a light beam through the transparent member and air gap, and onto the reflective slider. The light reflects off of the slider and the transparent member to create an interference pattern. The reflected light is detected by a photodetector that is coupled to a computer. The slider reflectivity r is found from the reflected light. An empirically derived linear equation which correlates the real part (n) of the slider refractive index to reflectivity (r) is next used to estimate n from r. Given n and r the phase offset and space can then be calculated.

Determining the complex refractive index phase offset in interferometric

An apparatus and method for measuring the topographic profile of a reflective member having an index of refraction. The apparatus comprises a first optical system that reflects a light beam from the reflective member and detects the reflected light beam. A second optical system directs the light beam to interfere with the reflected light beam and detects the resulting interference pattern. A processor coupled to the first optical system and the second optical system computes the index of refraction of the reflective member from the detected reflected light beam and provides the topographic profile of the reflective member from the index of refraction and the interference pattern.

Combined interferometer/polarimeter

An electrostatic discharge device for a flying height tester which measures the air gap of a recording head. The tester includes a transparent disk that is rotated by a spindle motor. The spindle motor is mounted to a spin stand. The tester has a manifold that is mounted to the spin stand and directs a flow of ionized fluid to a bottom surface of the disk. The manifold is also electrically grounded. The ionized fluid and electrically grounded manifold provide an electrical path that discharge electrostatic charge located on the bottom surface of the disk. The manifold extends from an inner disk diameter to an outer disk diameter so that ionized fluid is introduced to the entire bottom surface of the rotating disk. Additionally, the manifold location is such that the ionized fluid provides an electrical path from the disk to the manifold that is relatively constant across the surface of the disk. The manifold location insures that the electrostatic charge is discharged from the entire bottom surface of the disk. The manifold is also grounded by a fixed wire to provide a reliable ground path for the device.

Apparatus and method for efficient electrostatic discharge on glass

An apparatus and method for measuring the space between a transparent member such as a disk, and reflective member such as a slider, by detecting a change of polarization of a reflected light beam. The apparatus includes a light source that emits a light beam. The light beam is circularly polarized and directed onto the disk and reflected off of the interface between the disk and the slider. The reflected light beam is split into four separately polarized beams by a beam splitter/polarizer assembly. The four light beams have varying intensities that are measured by photodetectors. Stokes parameters are computed from electrical signals that are generated by the photodetectors. The Stokes parameters correlate to the change in polarization of the reflected light beam. Ellipsometric parameters delta and psi are computed from the Stokes parameters. The thickness of the space and the complex index of refraction (n and K) of the slider are computed from the delta and psi parameters, typically by computing two separate sets of ellipsometric parameters at two different spacing thicknesses.

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San Diego, CA, United States of America

Kenneth H Womack