Battelle Memorial Institute

Applied Materials, Inc.

Kenneth G Rappe

Christopher Lyle Aardahl

Yong Wang

Jamelyn D Holladay

Darrell R Herling

Gary B Josephson

Delbert L Lessor

Amit K Sharma

Robert T Rozmiarek

Chris L Aardahl

Peter I Porshnev

Sebastien Raoux

Rick J Orth

Mike Woolston

The present invention provides a process for producing reagents for a chemical reaction by introducing a fuel containing hydrocarbons into a flash distillation process wherein the fuel is separated into a first component having a lower average molecular weight and a second component having a higher average molecular weight. The first component is then reformed to produce synthesis gas wherein the synthesis gas is reacted catalytically to produce the desire reagent.

Method of generating hydrocarbon reagents from diesel, natural gas and other logistical fuels

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as Fthat involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a reducing agent is mixed with the halogen-containing gas to produce a feed gas mixture and a non-thermal plasma is generated in the feed gas mixture in the presence of liquid water.

Processes and apparatuses for treating halogen-containing gases

A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of the process chamber, a plasma cell having one or more electrodes electrically connected to a voltage source adapted to electrically bias the electrodes to couple energy to effluent received in the plasma cell, a scrubbing cell coaxially exterior to the plasma cell, the scrubbing cell having a scrubbing fluid inlet to introduce scrubbing fluid into effluent in the scrubbing cell and a scrubbing fluid outlet, and an effluent outlet to release the treated effluent.

Treatment of effluent from a substrate processing chamber

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Richland, WA, United States of America

Kenneth G Rappe