Oracle International Corporation

Kla Tencor Corporation

Kla-tencor Coporation

Kenneth F Hatch

David Lee Brown

Lance Glasser

Kurt Lehman

Venkatraman Iyer

Henrik Nielsen

Guowu Zheng

Mansour Kermat

Yung-Ho Alex Chuang

James Michael Frei

Jyotika Singh

Ryan Travis Caldwell

Alex Chuang

Connie K Szeto

A method for characterization of fixture utilizes a mirror symmetric THRU structure and either a HALF-THRU with a LOAD shunted to ground or a THRU with a LOAD shunted to ground located at the mirror reference plane. The method extracts the short, open, and thru measurements from the THRU structure due to the mirror symmetry. The HALF-THRU with a LOAD or the THRU with a LOAD shunted to ground located at the mirror reference plane provides the independent measurement to fully characterize the fixture. The resultant impedance or scattering parameter HALF-THRU model may be used in de-embedding a Device-Under-Test, a calibration routine, or computational simulations. The parameters of a HALF-THRU model may be stored in a memory storage circuit affixed to the associated HALF-THRU fixture. Some embodiments may include at least one memory storage circuit that attaches to the HALF-THRU fixture body affixed to an interposing matable connector.

De-embedding and calibration of mirror symmetric reciprocal networks

A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.

Integrated multi-channel analog front end and digitizer for high speed imaging applications

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Sunol, CA, United States of America

Kenneth F Hatch