Mykrolis Corporation

Celerity, Inc.

Authentix, Inc.

Millipore Corporation

Kenneth E Tinsley

Faisal Tariq

Dwight S Larson

A light source is gated ON and OFF in response to a pulsed signal. Photo emissions from the light source are coupled to a material under test. Resonant fluorescent emissions from the material are coupled to a photodiode. Current from the photodiode is coupled into an amplifier system comprising a first and second amplifier stages. The first amplifier stage is gated to a low gain when the light source is turned ON and the gain is increased when the light source goes from ON to OFF. The second amplifier stage has digitally programmable offset and gain settings in response to control signals. The output of the second amplifier stage is digitized by an analog to digital converter. A controller generates the pulse control signal and the control signals.

Fluorescence emissions detector

Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.

Method and system for a mass flow controller with reduced pressure sensitivity

Embodiments of the present invention provide a system and method of valve control that eliminates, or at least substantially reduces, the shortcomings of prior art valve control systems and methods. More particularly, embodiments of the present invention provide systems and methods for multi-channel valve control. One embodiment of the present invention includes a system of valve control that comprises a processor, a computer readable medium accessible by the processor and a set of computer instructions that are executable by the processor to output a first signal on a first channel indicating an initial force to be applied to a valve by an actuator and output a second signal on a second channel indicating a control force to be applied to the valve.

Valve control system and method

The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.

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Frisco, TX, United States of America

Kenneth E Tinsley