Applied Materials, Inc.

Kenneth E Pfeiffer

Russell Manchester

Shyh-Nung Steve Lin

Don Titel

Gregory S Verdict

Wayne W Wheatley

Todd W Sharpe

Hongyun Wang

In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressure controller based on a difference between the pressure measurement and the set point pressure. The system includes a pressure measurement device coupled to the chamber and to the pressure controller, and a main controller coupled to the variable speed vacuum pump, the pressure controller and the pressure measurement device. The pressure measurement device measures a pressure within the chamber and provides a pressure measurement to the pressure controller and the main controller. The main controller (1) adjusts a speed of the variable speed vacuum pump; and (2) provides the set point pressure to the pressure controller.

Methods and apparatus for maintaining a pressure within an environmentally controlled chamber

The present invention provides an improved finishing process and apparatus. In one embodiment, a method and apparatus are provided for finishing a metal article. The method includes cavitationally eroding the metal article to form pits in its external surface. The metal article is also corroded with a corrosion chemical to corrode the pitted metallic surface. In this manner, substantially homogeneously distributed micro-pits can be formed about the article to create a desired matte finish, as well as a surface that is amenable for sealing. In a preferred embodiment, the corrosion chemical is part of a finishing bath that is ultrasonically cavitated for eroding the metal article.

Ultrasonic metal finishing

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Round Rock, TX, United States of America

Kenneth E Pfeiffer