Chemand Corporation

Other

The Boc Group, Inc.

Chenand Corporation

Kenneth Alan Johnson

Randy Forshey

The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

Chemical mix and delivery systems and methods thereof

A fluid handling port array includes at least one fluid conduction bore, a plurality of insert bores each intersecting at least one fluid conduction bore and being adapted to receive a configuration insert, a plurality of port bores each intersecting at least one of the fluid conduction bores for providing fluid access to the fluid conduction bores. The port array is configured by fixing configuration inserts in the insert bores. In a particular embodiment, the configuration inserts comprise device seats and are adapted to receive configuration devices such as a valves, caps or plugs. Alternatively, the configuration inserts, themselves, embody configuration devices.

Fluid handling port array

The multi-chamber liquid pump of the present invention includes an input chamber, an intermediate chamber and a liquid output chamber. Pressurized gas provides the motive force for outputting liquid from the pump, such that liquid is output at a constant flow rate during pump operation. Liquid flows into the input chamber, through one or more valves into the intermediate chamber, and through one or more subsequent valves to the output chamber while liquid is constantly output from the output chamber. The system controller provides control signals to the valves to facilitate the pump's continual operation.

Gas pressurized liquid pump with intermediate chamber

A carriage assembly provides for holding a pressurizable vessel used in delivering fluid to a processing system, the pressurizable vessel having an elongated body defining a longitudinal axis, a first end, and a second end. The carriage assembly includes: a support structure for holding the vessel such that the axis is non-vertical, the support structure being substantially isolated from mechanical vibration caused by the processing system; and a sensor coupled with the vessel and operative to generate a signal indicative of the amount of fluid stored in the vessel. The support structure provides a fulcrum proximate the first end of the vessel, and the sensor includes a load sensor mechanically coupled with a portion of the vessel which is located proximate its second end. The sensor is operable to generate the signal in response to force exerted on the load sensor by the weight of the vessel.

Pressure vessel isolation carriage

A dispense head assembly includes a bung adapter, a body receiver, and a dispensing body. The bung adapter inserts into a drum. The body receiver selectively inserts into the bung adapter, and the dispensing body selectively inserts into the body receiver. A single, unobstructed, uniform-diameter flowpath routes fluid from the drum into a chamber within the body receiver. A movable piston within the chamber selectively blocks fluid flow between the fluid flowpath and a dispense opening on the dispensing body. The body receiver and the dispensing body are key matched, for safe and rapid coupling and decoupling.

Growing community of inventors

Stockton, CA, United States of America

Kenneth Alan Johnson