Vigilent Corporation

Asml Holding N.v.

Kennard White

Daniel N Miller

Peter Christian Varadi

Clifford Conrad Federspiel

Matthew Lipson

Ronald A Wilklow

Peter Richard Helmus

James Kennon

Wilbur Jordan Reichmann, Ii

A method and apparatus for providing environmental management in a monitored facility. In one embodiment, the method comprises obtaining at least one mathematical expression representing the behavior of at least one piece of equipment in a monitored equipment housing facility; and generating, for the at least one piece of equipment and using the at least one mathematical expression, a predicted impact of an operational state of the at least one piece of equipment.

Method and apparatus for providing environmental management using smart alarms

The present invention is directed to methods and apparatuses for environmental management using a smart alarm comprising, receiving one or more readings from one or more sensors, wherein the sensors are of at least one or more distinct logical types, generating one or more derived points representing the one or more readings from the sensors and alerting one or more alarm units when the derived points satisfy an alarm condition.

An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

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El Cerrito, CA, United States of America

Kennard White