Showa Denko K.k.

Kenji Yakushiji

Hisayuki Miki

Katsuki Kusunoki

A method for producing a semiconductor light-emitting device includes stacking at least a first conductive type semiconductor layer (), an active layer () and a second conductive type semiconductor layer () on a substrate () to form a wafer, then forming on a side of growth surfaces of the semiconductor layers first trenches () exposing the first conductive type semiconductor layer, further forming second trenches () reaching the substrate from above the first trenches by using a laser beam, subsequently forming third trenches () from the substrate at the positions corresponding to the second trenches, and finally cutting the wafer into chips. The produced semiconductor chips provide an enhanced efficiency of extracting emitted light even when the end faces thereof are smooth surfaces and they allow the semiconductor layer to be cut without distorting the end faces of the chips.

Method for fabrication of semiconductor light-emitting device and the device fabricated by the method

An object of the present invention is to provide a method of producing a Group III nitride semiconductor device having a chip form which is pentagonal or more highly polygonal maintaining good area efficiency and at a low cost. The inventive method of producing a Group III nitride semiconductor device having a chip shape which is a pentagonal or more highly polygonal shape comprises a first step of epitaxially growing a Group III nitride semiconductor on a substrate to form a semiconductor wafer; a second step of irradiating said semiconductor wafer with a laser beam to form separation grooves; a third step of grinding and/or polishing the main surface side differently from the epitaxially grown main surface of the substrate; and a fourth step of division into individual chips by applying stress to said separation grooves.

Growing community of inventors

Ichihara, Japan

Kenji Yakushiji