Canon Kabushiki Kaisha

Kenji Yaegashi

Takamitsu Komaki

Toshiki Iwai

Tooru Kawashima

An alignment method of aligning a first object and a second object includes detecting a moire fringe formed by a mark of the first object and a mark of the second object by using a detection unit, detecting an evaluation mark for correcting a detection result of the moire fringe, by the detection unit, and acquiring a detection result of the evaluation mark, determining a relative position of the mark of the first object and the mark of the second object by correcting a detection result of the moire fringe by use of the detection result of the evaluation mark, and aligning the first object and the second object based on the relative position. The evaluation mark is provided in at least one of the first object and the second object.

Object alignment method, imprint method, article manufacturing method, detection apparatus, imprint apparatus, mold, and substrate

An imprint apparatus brings an imprint material on a substrate including a first mark into contact with a mold including a second mark and cures the imprint material, thereby forming a cured product of the imprint material on the substrate. The apparatus includes a plurality of detectors used for alignment detection, and a controller configured to obtain a plurality of pieces of relative position information by detecting a relative position between the first mark and the second mark a plurality of times using the plurality of detectors in a state in which the imprint material is cured and a positional relationship between the substrate and the mold is maintained, and to calibrate, based on the plurality of pieces of relative position information, a plurality of detection processing operations each performed using each of the plurality of detectors.

Imprint apparatus and article manufacturing method

A measurement device for measuring a relative position between alignment marks includes an illumination unit capable of illuminating the alignment marks at a plurality of wavelengths, a detection unit that detects light from the alignment marks, a processing unit that obtain the relative position between the alignment marks, and an adjustment unit that adjusts a relative amount between light amounts of the plurality of wavelengths so that a relative value between detection light amounts of light from the alignment marks falls within a predetermined range.

Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment method

The present invention provides a detection apparatus for detecting a plurality of marks, comprising a plurality of detection units each including a mirror and a scope configured to detect light from the marks via the mirror, wherein the plurality of detection units include a first detection unit, a second detection unit, and a third detection unit, and in a surface direction parallel to a surface on which the plurality of marks are arranged, a direction of an optical axis between the mirror and the scope in the third detection unit is different from at least one of a direction of an optical axis between the mirror and the scope in the first detection unit and a direction of an optical axis between the mirror and the scope in the second detection unit.

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Utsunomiya, Japan

Kenji Yaegashi