King Jim Co., Ltd.

Seiko Epson Corporation

Ebara Corporation

Other

Kabushiki Kaisha Toshiba

Hitachi, Ltd.

Sony Corporation

Nec Corporation

Meidensha Corporation

Hitachi-High-Technologies Corporation

Canon Kabushiki Kaisha

Alps Electric Co., Ltd.

Asahi Kogaku Kogyo Kabushiki Kaisha

Toshiba Mitsubishi-Electric Industrial Systems Corporation

Bandai Co., Ltd.

Kenji Watanabe

Takanobu Kameda

Tomoyuki Shimmura

Chieko Aida

Takeshi Hosokawa

Masahiro Hatakeyama

Hiroyasu Kurashina

Takeshi Murakami

Tohru Satake

Nobuharu Noji

Tsutomu Karimata

Hitoshi Hayama

Shoji Yoshikawa

Mamoru Nakasuji

Toshifumi Kimba

Hirosi Sobukawa

Yuichiro Yamazaki

Norio Kimura

Minori Noguchi

Hidetoshi Nishiyama

Akira Hamamatsu

Tetsuya Watanabe

Takahiro Jingu

Takao Kato

Yoshiyuki Yanagisawa

Teiyu Goto

Junichi Tanaka

Shunji Maeda

Junichi Sato

Minoru Yoshida

Yukihiro Shibata

Shoji Suzuki

Kenji Oka

Kazuo Yamaguchi

Hiroshi Kobayashi

Yuji Takagi

Takeo Kawanami

Chie Shishido

Tachio Kawai

Hiroaki Tanaka

Toru Takagi

Koji Kobayashi

Hiroshi Hagiwara

Kenji Uchida

Akira Hashimoto

Kenji Obara

Akio Hayashi

Muneki Hamashima

Takuji Hamasaki

Akinobu Hirayama

Masahiko Nunokawa

Yoshiya Toyosawa

Ryo Tajima

Kenichi Suematsu

Tomoyuki Ichikawa

Kenji Terao

Yoshihiko Naito

Ichirota Nagahama

Kenichi Nakajima

Hideki Oikawa

Hiroshi Kuriyama

Katsunori Ichiki

Kiwamu Tsukamoto

Shin Oowada

Kazuo Yamauchi

Mutsumi Saito

Takamitsu Nagai

Hiroshi Sobukawa

Yasushi Toma

Hideo Sodeyama

Yoshiyuki Kikuchi

Tsutomu Kubota

Atsushi Yoshida

Eiji Kaneko

Satoshi Murata

Shinichi Okada

Shunsuke Hijikata

Kazuyoshi Sugihara

Tomoya Tateishi

Takehiro Hayashi

Tsutomu Okutomi

Haruki Eguchi

Shinji Kuniyoshi

Morio Usami

Yoshinobu Ishikawa

Yasuhiko Ozawa

Hiromitsu Kumada

Takateru Ohkubo

Taku Sato

Seiji Ichikawa

Atsushi Shimoda

Atsushi Matsuda

Osamu Sasaoka

Tomohisa Kohiyama

Tsuneyo Seki

Kohei Koguchi

Seiji Isogai

Yasuo Yoda

Shuhei Watanabe

Masataka Okayama

In an image forming apparatus, a tray unit to which a cartridge is detachably mounted, and that is configured to be capable of moving between an internal position situated within the apparatus main body and an external position situated outside, includes first and second side plates configured to support the cartridge, and they are each made of metal, and include a supporting portion and an outer side portion, the supporting portions includes positioning portions configured to come into contact with the cartridge to position the cartridge as to an image forming position. The apparatus main body includes first and second pressing members each capable of moving between pressing positions at which the cartridge is pressed, and separated positions separated from the cartridge. The first and second pressing members are disposed each intersecting with imaginary planes that is orthogonal to the longitudinal direction and intersect the positioning portions.

Image forming apparatus having improved mountability of a cartridge while conserving space

An image forming apparatus includes a first toner cartridge to store first toner and is movable to a first attached position and a first retracted position with respect to a storage frame, and a second toner cartridge to store second toner and is movable to a second attached position and a second retracted position with respect to a second storage frame. A movable first support member supports the first toner cartridge, and a movable second support member supports the second toner cartridge. In a case where a length by which the first toner cartridge at the first retracted position projects from an opening in a body frame is a first length and a length by which the second toner cartridge at the second retracted position projects from the opening is a second length, the first length is larger than the second length.

Image forming apparatus having first and second retractable toner cartridges

A measurement data synchronization method for synchronizing, through use of a data analysis apparatus, time series outputted from first through fifth measuring instruments, includes a step STfor acquiring first through fifth reference data outputted from the first through fifth measuring instruments when a reference signal including a stationary interval and a rising interval is inputted to the measuring instruments simultaneously, steps ST-STfor generating first through fifth filter processed data by applying median filter processing to the first through fifth reference data to extract the median value in a prescribed duration, a step STfor calculating first through fifth rising times as timing information of rising from each of the first through fifth filter processed data, and a step STfor synchronizing first through fifth measurement data outputted from the measuring instruments on the basis of the first through fifth rising times.

Measurement data synchronization method, testing method, and non-transitory computer-readable medium storing computer program

Provided is an electron beam irradiation apparatus including: an aligner configured to perform an alignment of an electron beam by deflecting the electron beam; a deflector having a plurality of electrodes and configured to deflect the electron beam after passing through the aligner; and an adjuster configured to adjust deflection caused by the aligner, wherein the adjuster is configured to perform, on each of the plurality of electrodes, detecting an image of the electron beam by applying a test voltage to one of the plurality of electrodes and applying a reference voltage to the other electrodes, determine a position shift of the electron beam based on each position of the image of the electron beam corresponding to each electrode, and adjust deflection of the aligner so as to cancel the position shift of the electron beam.

Electron beam irradiation apparatus and electron beam alignment method

An industrial plant data reproduction device includes the following. A process data collection unit collects process data regarding a group of devices and materials to be processed by the group of devices. A video data collection unit collects video data in which an object whose image is to be obtained is captured, the object pertaining to the group of devices. A graphic data storage unit stores in advance graphic data indicative of a motion target position of the object whose image is to be obtained for each material specification. A graphic data selection unit selects the graphic data corresponding to the material specifications included in the process data every time each of the materials reaches the object whose image is to be obtained. A display processing unit outputs synthetic data in which the selected graphic data is overlaid on the video data.

Industrial plant data reproduction device

An adjustment method for adjusting a path of an electron beam passing through an electron beam device including at least one unit having at least one lens and at least one aligner electrode, and a detector configured to detect the electron beam, the method including: a step of measuring, by a coordinate measuring machine, an assembly tolerance for each of a plurality of the units constituting the electron beam device; a step of determining a shift amount of the electron beam at a position of the at least one of the lenses; a step of determining an electrode condition for each of a plurality of the aligner electrodes included in the units in a manner such that a shift amount of the electron beam is to be the determined shift amount; and a step of setting each of the aligner electrodes to the corresponding determined electrode condition.

Adjustment method and electron beam device

This accelerator play measurement device measures the play opening of an accelerator pedal of a vehicle, and includes: an accelerator actuator for operating the accelerator pedal; a vehicle speed sensor for detecting the vehicle speed of the vehicle; a first measurement unit for calculating a provisional play opening on the basis of a change in vehicle speed detection value from the vehicle speed sensor when the accelerator actuator has been driven and the accelerator pedal opening degree has been increased at a first speed from a fully-closed opening degree; and a second measurement unit for detecting the play opening on the basis of a change in vehicle speed detection value when the accelerator actuator has been driven and the accelerator pedal opening degree has been increased at a second speed higher than the first speed from the fully-closed opening degree to close to the provisional play opening.

Accelerator play measurement device, accelerator play measurement method, program, and medium

There has been a problem with operability when performing inertia verification, due to the fact that a setting window and a measurement result window are different. A setting display function section to set a setting value for measurement and a measurement result display function section that displays a result measured on the basis of the setting value are provided in one window on a display screen of an inertia verification device. The setting display function section has a setting value indicating section that indicates mechanical inertia, an operation condition setting section and a progress indicating section. The measurement result display function section has a monitor window indicating section and a measurement result indicating section.

Inertia verification device for chassis dynamometer system

Provided is a method of adjusting an electron-beam irradiated area in an electron beam irradiation apparatus that deflects an electron beam with a deflector to irradiate an object with the electron beam, the method including: emitting an electron beam while changing an irradiation position on an adjustment plate by controlling the deflector in accordance with an electron beam irradiation recipe, the adjustment plate detecting a current corresponding to the emitted electron beam; acquiring a current value detected from the adjustment plate; forming image data corresponding to the acquired current value; determining whether the electron-beam irradiated area is appropriate based on the formed image data; and updating the electron beam irradiation recipe when the electron-beam irradiated area is determined not to be appropriate.

Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus

An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

Inspection device

An electron beam inspection device includes: a primary electron optical system that irradiates the surface of a sample with an electron beam; and a secondary electron optical system that gathers secondary electrons emitted from the sample and forms an image on the sensor surface of a detector. An electron image of the surface of the sample is obtained from a signal detected by the detector, and the sample is inspected. A cylindrical member that is formed with conductors stacked as an inner layer and an outer layer, and an insulator stacked as an intermediate layer is provided inside a lens tube into which the secondary electron optical system is incorporated. An electron orbital path is formed inside the cylindrical member, and the members constituting the secondary electron optical system are arranged outside the cylindrical member.

A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen observation method comprises: irradiating the specimen with an electron beam; detecting electrons to be observed which have been generated and have obtained information on the specimen by the electron beam irradiation; and generating an image of the specimen from the detected electrons to be observed. The electron beam irradiation comprises irradiating the specimen with the electron beam with a landing energy set in a transition region between a secondary emission electron region in which secondary emission electrons are detected and a mirror electron region in which mirror electrons are detected, thereby causing the secondary emission electrons and the mirror electrons to be mixed as the electrons to be observed. The detection of the electrons to be observed comprises performing the detection in a state where the secondary emission electrons and the mirror electrons are mixed. Observation and inspection can be quickly carried out for a fine foreign material and pattern of 100 nm or less.

Specimen observation method and device using secondary emission electron and mirror electron detection

There is a demand for enhancement of operability when a change of combination of rollers of a chassis dynamometer and the dynamometer is set depending upon a vehicle type of a test vehicle. A status indicating function block that indicates an equipment construction is disposed in a main menu display area that is provided on a console. With this arrangement, a current test status can be recognized. Further, a vehicle type selection window calling function block is disposed in a mode setting function button group in the main menu display area. A vehicle type selection window called by the vehicle type selection window calling function block includes a roller selection section to select rollers corresponding to the test vehicle, a setting display section that indicates a current setting equipment construction, and a setting display section that indicates a setting equipment construction during change of the setting.

Operation display device of chassis dynamometer system

A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the stage to obtain a pattern matching template image including feature coordinates of the reference die. A pattern matching is performed with an arbitrary die in a row or column including the reference die using the template image to obtain feature coordinates of the arbitrary die. An angle of misalignment is calculated between the direction of the row or column including the reference die and one of the directions of movement of the substrate on the basis of the feature coordinates of the arbitrary die and those of the reference die. The stage is rotated to correct the angle of misalignment to conform the direction of the row or column including the reference die with the one of the directions of movement of the substrate.

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

An inspection apparatus by an electron beam comprises: an electron-optical devicehaving an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical systems; a stage systemfor holding and moving the object relative to the electron-optical system; a mini-environment chamberfor supplying a clean gas to the object to prevent dust from contacting the object; a working chamberfor accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambersdisposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loaderfor transferring the object to the stage system through the loading chambers.

Inspection system by charged particle beam and method of manufacturing devices using the system

Growing community of inventors

Tokyo, Japan

Kenji Watanabe