Canon Kabushiki Kaisha

Hitachi, Ltd.

Other

Hitachi-high-technologies Corporation

Kenji Tamamori

Shinan Wang

Haruhito Ono

Masahiko Okunuki

Yoshinori Nakayama

Taiko Motoi

Toshiaki Aiba

Masato Muraki

Hiroyuki Ozaki

Yuichi Iwasaki

Masayoshi Esashi

Kouji Asano

Yoshiaki Moro

Shinichi Hashimoto

Chienliu Chang

Yasuhiro Soeda

Nobuki Yoshimatsu

Takahiro Ezaki

Yasuhiro Shimada

Keiji Watanabe

Kazuhiro Asai

Aihiko Numata

Futoshi Hirose

Yasushi Koyama

Atsunori Terasaki

Shingo Nagata

Takashi Sugawara

Seiichiro Yaginuma

Masaki Ohsumi

Hikaru Hoshi

Tetsushi Ishikawa

Masatake Akaike

Fumiaki Mizutani

Ken-ichi Nagae

Yoshinori c/o Hitachi Ltd Ipg Nakayama

Ken-Ichi Nagae

Yoshinori c/o Hitachi Ltd Nakayama

A manufacturing method for a structure includes preparing a dry film supported on one surface of a support; bonding the dry film to a substrate so that the dry film and the substrate are in contact with each other; performing first exposure of the dry film bonded to the substrate via the support; removing the support after the first exposure; performing second exposure of the dry film after the support is removed via a photomask; and developing the dry film after the first exposure and the second exposure.

Manufacturing method for structure and manufacturing method for liquid ejection head

A liquid ejection apparatus that prevents a user's hand from becoming dirty when attaching and detaching a liquid holding container, the liquid ejection apparatus includes a space portion that is open on a side surface of a housing, a liquid holding container that is detachably mounted to the space portion and includes an introduction port for introducing liquid to an inside thereof, on an upper surface, and a discharge portion that is provided at a position facing the introduction port inside the space portion in a state in which the liquid holding container mounted and includes a discharge port for discharging the liquid to the inside of the liquid holding container, in which the discharge portion is configured such that at least the discharge port is movable.

Liquid ejection apparatus

A liquid ejection head includes an ejection orifice forming surface provided with an ejection orifice from which a liquid is ejected. The ejection orifice forming surface includes a first region in a vicinity of the ejection orifice, a second region that is further spaced apart from the ejection orifice than the first region and protrudes from the first region in a liquid ejection direction and a third region that connects the first region and the second region. When a contact angle of pure water in the first region is a first contact angle &#x3b8;1 and a contact angle of pure water in the third region is a third contact angle &#x3b8;3, &#x3b8;1 is larger than &#x3b8;3 by 10 degrees or more.

Liquid ejection head and manufacturing method thereof

Provided is a technology that realizes a variable shape mirror using an actuator having a comb electrode structure, which can be relatively easily manufactured and displaced in two (&#xb1;) directions perpendicular to a mirror reference plane. A variable shape mirror () includes: a mirror base () including a reflective surface (); and an actuator () including a first actuator and a second actuator. Each of the plurality of actuators is connected to the mirror base via a connecting portion (). The first actuator has a first electrode pair () of a comb electrode structure for displacing the connecting portion in a first direction perpendicular to the reflective surface. The second actuator has a second electrode pair () of a comb electrode structure for displacing the connecting portion in a second direction opposite to the first direction, the second electrode pair being separately formed from the first electrode pair.

Variable shape mirror, ophthalmological apparatus, adaptive optical system and method of manufacturing variable shape mirror

A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.

Deformable mirror and method for manufacturing the same

Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.

Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system

An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

Element array with a plurality of electromechanical conversion devices

A method of producing a three-dimensional photonic crystal by laminating a layer having a periodic structure, the method including the steps of forming a first structure and a second structure each including the layer having the periodic structure; and bonding a first bonding layer of the first structure and a second bonding layer of the second structure. The first bonding layer is one layer obtained by dividing a layer constituting the three-dimensional photonic crystal at a cross section perpendicular to a lamination direction, and the second bonding layer is the other layer obtained by dividing the layer constituting the three-dimensional photonic crystal at the cross section perpendicular to the lamination direction.

Method of producing three-dimensional photonic crystal and optical functional device

Element array, electromechanical conversion device, and process for producing the same

A method for forming an etching mask comprises irradiating a focused ion beam onto a surface of a substrate and forming an etching mask used for oblique etching including an ion containing portion in the irradiated region. A method for fabricating a three-dimensional structure comprises preparing a substrate, irradiating a focused ion beam onto a surface of the substrate and forming an etching mask including an ion-containing portion in the irradiated region, and dry-etching the substrate from a diagonal direction using the etching mask and forming a plurality of holes.

Method for forming etching mask, method for fabricating three-dimensional structure and method for fabricating three-dimensional photonic crystalline laser device

A method of manufacturing a nano structure by etching, using a substrate containing Si. A focused Ga ion or In ion beam is irradiated on the surface of the substrate containing Si. The Ga ions or the In ions are injected while sputtering away the surface of the substrate so that a layer containing Ga or In is formed on the surface of the substrate. Dry etching by a gas containing fluorine (F) is performed with the layer containing the Ga or the In formed on the surface of the substrate taken as an etching mask, and the nano structure is formed having a pattern of at least 2 &#x3bc;m tin in depth according to a predetermined line width.

Method of manufacturing a nano structure by etching, using a substrate containing silicon

A nano structure formed on the surface of a substrate containing Si and having a pattern of at least 2 &#x3bc;m in depth, in which Ga or In is contained in the surface of the pattern, and the Ga or the In has a concentration distribution that an elemental composition ratio Ga/Si or In/Si of Si and Ga or In detected by an X-ray photoelectron spectroscopy is at least 0.4 atomic percent in the depth direction of the substrate, and the maximum value of the concentration is positioned within 50 nm of the surface of the pattern.

Nano structure and method of manufacturing nano structure

Provided are a laser apparatus into which a large current can be injected and a production method which enables easy production of the apparatus. A laser apparatus includes a light-emitting region on a substrate, and a periodic refractive index structure containing an i-type material provided at a periphery of the light-emitting region. Another laser apparatus includes a light-emitting region between a first electrode and a second electrode on a substrate, wherein at least one of the first and the second electrodes includes a periodic refractive index structure.

Laser apparatus and production method of laser apparatus

A process for forming a three-dimensional photonic crystal comprises the steps of providing a base material having a first face and a second face adjoining to each other at a first angle, forming a first mask on the first face, dry-etching the first face in a direction at a second angle to the first face to remove a portion of the base material not protected by the first mask, forming a second mask on the second face, and dry-etching the second face in a direction at a third angle to the second face to remove a portion of the base material not protected by the second mask.

Process for formation of three-dimensional photonic crystal

Growing community of inventors

Ebina, Japan

Kenji Tamamori