Mitsubishi Heavy Industries Limited

Kenji Tagashira

Yoshinori Kobayashi

Toshihiko Setoguchi

Yuichi Fujioka

Yoshihiko Tsuchiyama

Shigeyasu Ishigami

Katsuhiko Shinoda

Isao Torii

Akira Yamada

Yoshiaki Takeuchi

Keisuke Kawamura

Kenichi Arima

Hiroshi Mashima

Yoshihisa Arakawa

Kazuyuki Myoyo

Tatsuo Yokoshiki

Kazuyuki Myouyou

Takehiko Shirahata

A method for making the characteristics of the distribution of film thickness uniform is provided, avoiding generation of phase differences among streams of high-frequency electric power by manipulating the electrical characteristics of cables through which the high-frequency electric power is transmitted. Coaxial cables (toandto) having a standard length and vacuum cables (toandto) are installed, then a film is formed on a substrate by actually supplying high-frequency electric power, and thereafter the condition of vapor deposition such as the thickness of the film is observed. Based on the observations, the full lengths of the coaxial cables which communicate with the feeding points and the electrodes which correspond with positions over the substrate which need to be adjusted are changed. The coaxial cables are installed again, and high-frequency electric power equivalent to that used in the previous operation is supplied to form a film. The distribution of the film formed on the substrate is made uniform by repeating the above operations.

Method for plasma-enhanced chemical vapor deposition and apparatus for plasma-enhanced chemical vapor deposition

A fluidized bed incinerator having a combustion furnace includes first to fourth combustion sections. Fuel is supplied to the first combustion section and an combustion exhaust gas is exhausted after the fourth combustion section. First to fourth airs are supplied to the first to fourth combustion sections in first to fourth air surplus rates, respectively. The second air surplus rate is equal to or more than the first air surplus rate, the third air surplus rate is equal to or more than the second air surplus rate, and the fourth air surplus rate is equal to or more than the third air surplus rate.

Fluidized bed incinerator and combustion method in which generation of NOx, CO and dioxine are suppressed

CaS oxidation has CaS particles oxidized into CaSO completely as far as to the interior of the particle. The interior of an oxidation apparatus is partially partitioned by a partition to thereby form a first fluidized bed on the inner side, a second fluidized bed on the outer side and a space portion thereabove. A heat exchanger having a baffle plate is disposed on the inner side of the partition and an in-bed heat exchanger is disposed on the outer side of same. A desulfurizing product-containing fine powder and coarse powder and a mixture gas of nitrogen, oxygen and steam are supplied into the second fluidized bed . Also, coal and coal char are supplied into the first fluidized bed from below. Of the particles oxidized in the second fluidized bed and supplied into the first fluidized bed from below with the flow of a mixture gas , the fine powder entrains into the space portion as entrained particles and a major part thereof falls down into the second fluidized bed as particles . The completely oxidized particles are discharged as discharged ash and entrained ash

Calcium sulfide oxidation method and apparatus

CaS oxidation has CaS particles oxidized into CaSO,completely as far as to the interior of the particle. The interior of an oxidation apparatus,is partially partitioned by a partition,to thereby form a first fluidized bed,on the inner side, a second fluidized bed,on the outer side and a space portion,thereabove. A heat exchanger,having a baffle plate is disposed on the inner side of the partition,and an in-bed heat exchanger,is disposed on the outer side of same. A desulfurizing product-containing fine powder,and coarse powder,and a mixture gas,of nitrogen, oxygen and steam are supplied into the second fluidized bed,. Also, coal,and coal char,are supplied into the first fluidized bed,from below. Of the particles,oxidized in the second fluidized bed,and supplied into the first fluidized bed,from below with the flow of a mixture gas,, the fine powder entrains into the space portion,as entrained particles,and a major part thereof falls down into the second fluidized bed,as particles,. The completely oxidized particles are discharged as discharged ash,and entrained ash

Calcium sulfide oxidation method

A particle movement controller, being disposed between a first fluidized bed, to where particles are supplied, and a second fluidized bed, from where particles are discharged, which controls the moving amount of the particles from the first fluidized bed to the second fluidized bed, is improved to have a substantially proportional characteristic without a hysteresis. Flow rate control nozzle pipes 30a, 30b, . . . , 30j made of horizontal pipes are disposed vertically at intervals and nozzle holes 31 are formed in a lower surface of each of the nozzles. An amount of air emitted from each nozzle hole 31 is controlled using opening and closing valves 33a, 33b, . . . , 33j or flow rate adjustment valves 35a, 35b, . . . , 35j (FIG. 2).

Particle movement amount controller for fluidized beds

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Nagasaki, Japan

Kenji Tagashira