Sony Corporation

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Renesas Technology Corp.

Kenji Shintani

Masakazu Taki

Hiroki Ootera

Kazuyasu Nishikawa

Junichi Suzuki

Mutumi Tuda

Takashi Yamaguchi

Shigeo Kubota

Hidekazu Takahashi

Takahiro Maruyama

Akira Nakamura

Katsuaki Tsurushima

Yoichi Toriumi

Minoru Hanazaki

Nobuhiko Tsukahara

Tatsuo Oomori

Takaki Sugino

Mutsumi Tsuda

Hiroshi Oinoue

Junji Tanimura

Toshio Komemura

Hirofumi Hashimoto

Tsutomu Nagumo

Toshihiko Noguchi

Keiji Maruta

Kazutaka Noborimoto

Tomoyuki Ishida

Ryoichi Yoshifuku

Masashi Torimoto

Isao Umezawa

Katsunori Ishii

Junji Morimoto

Toshihiko Minami

Keiichi Sugahara

Koji Misaki

An infrared sensor includes an infrared sensor pixel in which a contact hole is formed to electrically connect a metal wiring layer and a support leg metal wiring layer that is located inside a support leg. The metal wiring layer is electrically connected to a signal reading circuit. The contact hole is formed by etching an insulating layer that is formed by deposition so as to cover the metal wiring layer, and has a bottom portion and a side wall portion that are each shaped into a forward tapered shape.

Infrared sensor and infrared solid-state image pickup apparatus

A portable telephone and electronic device are provided. The portable telephone includes a casing having a first surface: a finger guide section that is provided in the first surface and guides a finger of a user to allow the finger to be placed so that a side portion of the finger faces the first surface; an illuminating section provided in the first surface so as to be adjacent to the finger guide section, the illuminating section being capable of radiating light of a predetermined wavelength that transmits through the placed finger; an imaging section provided in the casing so as to be spaced at a predetermined distance from the first surface with respect to a perpendicular direction, the imaging section being capable of imaging the light that has transmitted through the finger; and a control section that performs authentication of the user on the basis of an image obtained by the imaging.

Portable telephone and electronic device

There is provided a cable for data transmission which can be wired and constructed without damaging a surface of a wall, ceiling, floor or the like, without using any clamps and which does not degrade appearance of a wired space, and further, allows the wiring construction of the cable provided with a plurality of core wires in a state of less crosstalk. A cable () for data transmission includes a core wire () having a medium that transmits data and a coating member () having adhesiveness and coating at least part of the core wire (). In this way, because of the adhesiveness of the coating member (), it is easy to stick the cable onto a wall () or the like. Moreover, since a wiring construction of the cable on a surface of the wall () or the like without using a clamp, screw or nail is made possible, only the cable is exposed on the surface of the wall () or the like and the appearance thereof is improved.

Data transmission cable

A high-frequency current detector of a plasma processing apparatus detects a high-frequency current produced when high-frequency power in the range that does not cause generation of plasma in a chamber is supplied from a high-frequency power supply source to the chamber. The high-frequency current detector outputs the detected high-frequency current to a computer. The computer compares the high-frequency current received from the high-frequency current detector with a reference high-frequency current. When the received high-frequency current matches the reference high-frequency current, the computer determines that the process performance is normal. Otherwise, the computer determines that the process performance is abnormal. In this way, high-frequency characteristics specific to the apparatus are detected and the process performance are evaluated based on the detected high-frequency characteristics.

Plasma processing apparatus capable of evaluating process performance

In a wafer treatment apparatus, a hydrofluoric acid gas supply pipe and an evacuation pipe are connected to a chamber storing a wafer for performing prescribed treatment. A control part is provided for controlling supply of hydrofluoric acid gas. The control part sets a time for supplying the hydrofluoric acid gas into the chamber to be longer than a time up to starting of etching of a reaction product and shorter than a time up to starting of etching of a gate insulator film. Thus, only the reaction product can be substantially etched without etching the gate insulator film.

Method of fabricating a semiconductor device including time-selective etching process

A method of etching a semiconductor device preventing tapering of a gate electrode edge includes a main etching of an electrode or wiring material supported by a dielectric film at a semiconductor substrate surface to expose the dielectric film. After the main etching step, residues of the electrode or the wiring material by sequentially etching utilizing a first gas mixture including a halogen-containing gas and an additive gas suppressing etching of the dielectric film by the halogen-containing gas, and in a second gas mixture gas including the halogen-containing gas and the additive gas and having the additive gas amount in a larger concentration than the first gas mixture.

Method of manufacturing semiconductor device

A plasma processing apparatus has a plurality of annular permanent magnets arranged concentrically of a polarity identical in the circumferential direction at the atmosphere side of a second electrode arranged opposite to a stage on which an object to be processed is placed. Arrangement is provided so that the polarity of magnets located adjacent radially is opposite. An insulation substrate is provided between a partition panel and a processing chamber to electrically insulate a plasma generation chamber. Direct current voltage is applied in a pulsive manner to the plasma generation chamber. Thus, a plasma processing apparatus can be provided that allows formation of plasma uniformly over a large area, and processing of a specimen of a large diameter uniformly.

Two chamber plasma processing apparatus

A plasma processing apparatus has a plurality of annular permanent magnets arranged concentrically with the same polarity in the circumferential direction at the atmosphere side of a second electrode arranged opposite to a stage on which a specimen is placed. Arrangement is provided so that the magnets located adjacent radially have opposite polarity. Furthermore, permanent magnets are arranged at the outer circumference of a vacuum vessel corresponding to a plasma generation chamber portion. A plasma processing apparatus can be provided that allows formation of uniform plasma over a large area and uniform processing of a specimen of a large diameter.

Plasma processing apparatus using a partition panel

A plasma is supplied from a plasma source to a space between an upper electrode plate and a lower electrode plate disposed opposite to and in parallel with the upper electrode plate when producing a plasma in the space between the electrode plates for plasma processing by applying radio-frequency power to the electrode plates. The plasma source produce a plasma by inductively coupled discharge, radio-frequency discharge or microwave discharge. A plasma processing apparatus is obtained which is capable of producing a parallel-plate plasma by discharge in a space of a relatively low pressure and is capable of processing a large diameter workpiece uniformly at a high processing rate.

Plasma processing apparatus

In an optical head having a plate-like half mirror functioning both as a beam splitter and for producing an astigmatism usable in detecting a focusing error, an optical element is provided for correcting a coma introduced by the half-mirror. Such optical element for correcting coma desirably includes a plate-like element inclined oppositely to the plate-like half mirror in respect to an optical axis of the head.

Coma correction in optical head with astigmatism for focusing error

A photosensor device and an optical pickup device incorporating the photosensor device are advantageously used in an optical compact disc player of the type where the optical pickup device is driven along a path at an acute tilt angle relative to the sides of a rectangular casing. The photosensor has a plurality of photosensitive elements aligned in a first direction and a plurality of terminal leads extending parallel to each other and perpendicular to a second direction so that the photosensor may be mounted on a circuit board in a conventional configuration to save space. Within the optical pickup device, the photosensitive elements are aligned at a mounting angle which is a function of the tilt angle so that the three optical beams are received thereon in the proper orientation.

Photo sensor device and optical pickup device

In an optical reproducing apparatus a divergent beam from a semiconductor laser light source is collimated to form a parallel light beam that is converged by an objective lens and focussed on an optical record medium. The light beam is reflected by the optical record medium and introduced into a signal photodetector so as to provide a reproduced signal. A phase type diffraction grating between the semiconductor laser light source and a beam splitter separates the laser beam from the semiconductor laser light source into zero, plus first and minus first order diffracted beams. A pair of tracking photodetectors receive reflected beams of the plus first and minus first order diffracted beams reflected by the optical record medium and then by the beam splitter. A concave lens located between the photodetectors and the beam splitter facilitates convenient positioning of the photodetectors so that a tracking error signal can be obtained by calculating the difference between the outputs of the first and second tracking photodetectors.

Optical reproducing apparatus

In an optical disc player or other apparatus in which a light beam is directed through an objective lens to be focused thereby at a record medium surface for optically reading information recorded in a track on such surface; the objective lens has its central axis offset in respect to the longitudinal axis of a cylindrical body forming part of a movable assembly and through which the light beam passes axially, and such cylindrical body is both angularly displaceable about its longitudinal axis and axially displaceable relative to a guide bearing forming part of a fixed assembly to correct for tracking errors and for focusing errors, respectively. The fixed assembly further includes a magnetic circuit generating a magnetic field which intersects coils included in the movable assembly to receive focusing error and tracking error signals, respectively.

Objective lens mount and drive for optical disc player

A device for supporting and positioning the objective lens in an optical reading apparatus, such as, a video disc player, comprises a first pair of parallel leaf springs attached at one end thereof to a fixed support member for motion parallel to a record medium surface. A movable frame is attached to the other ends of the first springs, and a second pair of leaf springs movable perpendicularly to the record medium surface extend from the frame, the second springs being generally parallel to and between the first pair but with their faces perpendicular to those of the first pair. The objective lens is mounted at the free ends of the second pair of springs, and is movable electromagnetically in orthogonally related directions by means of coils and magnets associated with the objective lens and with the frame.

Optical reading apparatus

An optical tracking apparatus for tracing a spiral track on a recording disk includes an optical pickup device having a semiconductor laser and a photoelectric conversion element; an arm device pivotally mounted to an arm shaft with the pickup device being mounted to the free end thereof to thereby move substantially along the radial direction of the recording disk; sectorial arm drive coil attached to a rear end portion of the arm device and having a current path loop in parallel with the rotational plane of the arm device; and a pair of stationary magnetic field forming devices, each formed of a respective yoke and permanent magnet assembly, the yokes having respective air gaps in which magnetic fields in opposite directions to each other are formed, the arm drive coil being arranged to move in the air gaps and being supplied with an arm drive signal and a tracking error correction signal for causing the pickup device to trace the track.

Growing community of inventors

Tokyo, Japan

Kenji Shintani