Smc Corporation

Smc Kabushiki Kaisha

Kenji Shinozaki

Kenji Moriyama

Tadaaki Saka

Toru Horiuchi

Control valve

The real mass flow rate is calculated for a variety of gases. The variety of gases are classified into a plurality of classifications, and representative discharge coefficient relationships are previously determined for the respective classifications. When an upstream pressure and a temperature are detected for a certain gas on an upstream side of the sonic nozzle, a theoretical mass flow rate is calculated. After the theoretical mass flow rate is calculated, reference is made to a theoretical mass flow rate-discharge coefficient correspondence table recorded in a memory corresponding to the classification of the gas, to determine a discharge coefficient based on the relationship appropriate for the gas type. After the discharge coefficient is selected, a real mass flow rate is determined as a product of the determined discharge coefficient and the theoretical mass flow rate.

Mass flow rate-measuring method and mass flow rate control apparatus

A flow meter for measuring a flow rate of a fluid passing through a fluid passage is provided with a throttle structure disposed at the inside, and it is connected to the fluid passage. The fluid passes through a groove via expanded grooves formed on a surface of a substrate which constitutes the throttle structure. The flow rate of the fluid passing through the fluid passage can be measured by detecting pressures and temperatures of said fluid on an inflow side and an outflow side concerning the throttle structure.

Growing community of inventors

Koshigaya, Japan

Kenji Shinozaki