Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Kenji Shinozaki

Tetsuya Kosugi

Masaaki Ueno

Hitoshi Murata

Masashi Sugishita

Tokunobu Akao

Atushi Umekawa

Hiroshi Ashihara

Yukinori Aburatani

Daisuke Hara

Takashi Yahata

Hidehiro Yanai

Masahiro Miyake

Shin Hiyama

Tomihiro Amano

Toshiya Shimada

Kazuhiko Yamazaki

According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber in which a substrate is processed; a first gas supply system configured to supply a first gas onto the substrate in the process chamber and including a plurality of tanks configured to store the first gas, wherein the first gas is heated in the plurality of the tanks; and a controller configured to control the first gas supply system such that the first gas is supplied onto the substrate in the process chamber while switching among the plurality of the tanks.

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Protector tube for thermocouple

A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector.

Substrate processing apparatus and method of manufacturing semiconductor device

Growing community of inventors

Toyama, Japan

Kenji Shinozaki