Shin-etsu Chemical Co., Ltd.

Nsk Corporation

Kenji Satoh

Sakae Matsumoto

Noboru Kimura

Shoji Kano

Tetsuo Nomura

Masaki Seki

Kenji Ito

There is disclosed a heating apparatus which has an electrostatic adsorption function and which comprises at least a supporting substrate, an electrode for electrostatic adsorption formed on a surface of one side of the supporting substrate, a heating layer formed on a surface of the other side of the supporting substrate, and an insulating layer formed so that it may cover the electrode for electrostatic adsorption and the heating layer wherein a volume resistivity of the insulating layer is varied in a plane. Thus, there can be provided a heating apparatus which has an electrostatic adsorption function wherein uniformity of a temperature distribution in a plane of the wafer when the wafer is heated can be improved, and the wafer can be heat-treated uniformly.

Heating apparatus which has electrostatic adsorption function, and method for producing it

A pyrolytic boron nirtride double container for a source of molecular beams used in molecular beam epitaxy, wherein the transmissivity of an inner container of the pyrolytic boron nitride double container with respect to light having a wave number of 2600 cmto 6500 cmis 90% or less of that of an outer container. The pyrolytic boron nitride double container, which enables molecular beams to generate stably with good temperature controllability and high heat efficiency and which can be used in a stable manner, is provided through a simple process and at low cost, so that molecular beam epitaxial growth can be stabilized, quality of the epitaxial film can be improved, and even though the rise and drop in the temperature of the material melt is repeated, or even at an emergency suspension of the operation, the trouble due to breakage of the container can be prevented.

Pyrolytic boron nitride double container and manufacture thereof

A shock absorbing type steering column apparatus including a collision energy absorbing mechanism for absorbing a secondary collision energy of an occupant upon a collision of a vehicle, comprises an energy absorption quantity adjusting device for changing an absorption quantity of the secondary collision energy absorbed by the collision energy absorbing mechanism, at least one of operation state detecting sensors for detecting a state of the occupant or of the vehicle, a collision detecting sensor for detecting the collision of the vehicle, and an electric control device for controlling a drive of the energy absorption quantity adjusting device on the basis of a result of the detection by the operation state detecting sensor at the point of time when the collision detecting sensor detects the collision of the vehicle.

Shock absorbing type steering column apparatus

A tilt lock mechanism of a tilt adjusting type steering apparatus comprises a fixed gear mounted on one of a lower column member and an upper column member, a movable gear supported to be freely rockable by the other of the lower column member and the upper column member to be detachably engaged with the fixed gear, a reaction force member disposed in the vicinity of the back surface of the movable gear, and a wedge member to take a lock position at which it is inserted between the reaction force member and the back surface of the movable gear to cause the movable gear to mesh with the fixed gear and a release position at which it is retracted from the lock position to release the movable gear from the fixed gear.

Growing community of inventors

Gunma-ken, Japan

Kenji Satoh