Seiko Epson Corporation

Epson Toyocom Corporation

Seiko Npc Corporation

Kenji Sato

Yutaka Takada

Masayuki Matsunaga

Hideto Naruse

Masahiro Oshio

Masayuki Takahashi

Yukihiro Unno

Norifumi Shimizu

Tatsunori Nakamura

A method for inspecting a physical quantity sensor includes: applying a test drive signal while changing a voltage level, to an angular velocity sensor as a physical quantity sensor having a detection portion which performs detection vibration according to a physical quantity; detecting an output signal from the detection portion corresponding to the test drive signal, as a test detection signal; and performing pass/fail determination based on a change in the test detection signal in relation to the change in the voltage level.

Method for inspecting physical quantity sensor and method for manufacturing physical quantity sensor

A physical quantity sensor includes a vibration element that performs drive vibration, an acceleration detection chip that detects an acceleration, a semiconductor element which is electrically connected to at least one of the vibration element and the acceleration detection chip, and a package that has a storage space for storing the vibration element, the acceleration detection chip and the semiconductor element. The semiconductor element is fixed to the package, the acceleration detection chip is fixed to the package with the semiconductor element interposed therebetween, and at least a portion of the acceleration detection chip overlaps the vibration element when the package is seen in a plan view.

Physical quantity sensor, electronic apparatus and moving object

Dynamic range of a second amplifier which is provided in a subsequent stage of a synchronous detection circuit is set greater than dynamic range of a first amplifier which is provided in a preceding stage of the synchronous detection circuit, and thus, an output is prevented from being saturated.

Physical quantity sensor, electronic apparatus, and moving object

A sensor device includes an IC chip, a package which includes a base in which the IC chip is provided and houses the IC chip, the base having a through hole provided in a position that overlaps with the IC chip in the plan view, and a spacer which is provided between the IC chip and the base, and has an aperture communicating the through hole with the space on the opposite side to the base with respect to the IC chip in the package between the IC chip and the space.

Electronic device and electronic apparatus

A substrate includes: a base; and a plurality of bonding terminals arranged on at least one surface of the base, wherein the plurality of bonding terminals include a first bonding terminal and a second bonding terminal, the first bonding terminal and the second bonding terminal include, in plan view of the base, a circle contacting portion extending along the circumference of a circle tangent to the first bonding terminal and the second bonding terminal, all of the plurality of bonding terminals are arranged so as not to protrude from an area including the circle and the inside thereof, and the circle contacting portion includes at least a first circle contacting portion disposed in the first bonding terminal and a second circle contacting portion disposed in the second bonding terminal.

Substrate, electronic device, and electronic apparatus

An angular velocity detection apparatus includes a vibrator that generates a signal that includes an angular velocity component and a vibration leakage component, a driver section that generates the drive signal, and supplies the drive signal to the vibrator, an angular velocity signal generation section that extracts the angular velocity component from the signal generated by the vibrator, and generates an angular velocity signal corresponding to the magnitude of the angular velocity component, a vibration leakage signal generation section that extracts the vibration leakage component from the signal generated by the vibrator, and generates a vibration leakage signal corresponding to the magnitude of the vibration leakage component, and an adder-subtractor section that adds the vibration leakage signal to the angular velocity signal, or subtracts the vibration leakage signal from the angular velocity signal, in a given ratio to correct temperature characteristics of the angular velocity signal.

Angular velocity detection apparatus and electronic instrument

An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and a temperature characteristic compensation unit that compensates for a variation due to a temperature in an output signal of the direct-current conversion unit.

Angular velocity detection circuit, angular velocity detection apparatus, and failure determination system

An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration of the resonator and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and an offset addition unit that adds an offset value to an output signal of the direct-current conversion unit.

Angular velocity detection circuit and angular velocity detection apparatus

An angular velocity detection apparatus (i.e., physical quantity detection apparatus) includes a gyro sensor element (i.e., physical quantity detection element) that allows an angular velocity detection signal that corresponds to the magnitude of an angular velocity (i.e., physical quantity) and a leakage signal of vibrations based on a drive signal (square-wave voltage signal) to flow through a detection electrode, a driver circuit that generates the drive signal, a synchronous detection circuit that performs a synchronous detection process on a detection target signal that includes the angular velocity detection signal and the leakage signal based on a detection signal that is synchronized with the drive signal, and a phase change circuit that changes a relative timing of at least one of a rising edge and a falling edge of the detection signal with respect to the detection target signal based on a control signal so that at least part of the leakage signal is output by the synchronous detection process.

Physical quantity detection apparatus, method of controlling physical quantity detection apparatus, abnormality diagnosis system, and abnormality diagnosis method

An inertial sensor, comprises a detection element detecting an amount of a physical quantity in a detection axis direction, a plurality of support members having flexibility and supporting nearly a center of the detection element, and a package substrate housing the detection element and the plurality of support members. In a case when an X-axis is defined as an extending direction of the plurality of support members, a Y-axis is perpendicular to the X-axis in a plane including the detection element, and a Z-axis is perpendicular to the X-axis and the Y-axis, one of load components in a direction of the Y-axis of the detection member applied to the plurality of support members is nearly equal to other among the plurality of support members, and one of load components in a direction of the Z-axis is nearly equal to the other among the plurality of support members.

Inertial sensor, inertial sensor device and manufacturing method of the same

An angular velocity detection apparatus includes: a sensor unit having first and second detection axes serving as angular velocity detection axes, the first and second detection axes intersecting each other; a sensor output correction circuit for making at least one of an offset adjustment and a sensitivity adjustment to a detection output of an angular velocity around the first detection axis and a detection output of an angular velocity around the second detection axis; a sign determination circuit for obtaining a sign of a rotational direction of an angular velocity on any one of the first and second detection axes; and an amplitude calculation circuit for multiplying a square sum average of detection outputs of angular velocities around the first and second detection axes outputted by the sensor output correction circuit and a sign outputted by the sign determination circuit.

Angular velocity detection apparatus

Inertial sensor

A mobile navigation system gyro module comprises: first and second gyro sensors outputting angular velocities &#x3c9;, &#x3c9;around first and second axes intersecting at an acute angle &#x3b8;; a sign determination circuit determining a sign of &#x3c9;; a correction circuit correcting the first and second gyro sensor outputs; and a computation circuit computing &#x3c9;'=&#x221a;(&#x3c9;+SA) and SA=(&#x3c9;&#x2212;&#x3c9;&#x2032; cos &#x3b8;)/sin &#x3b8;using angular velocities &#x3c9;&#x2032;, &#x3c9;from the correction circuit, and outputting angular velocity &#x3c9; by multiplying &#x3c9;&#x2032; by the sign of &#x3c9;, wherein the correction circuit includes: first and second offset adjustment circuits outputting &#x3c9;&#x2033; and &#x3c9;&#x2033; by respectively subtracting from &#x3c9;and &#x3c9;, corrections Band Bcorresponding to the first and second gyro sensor outputs when the mobile unit stops; and the angular velocity &#x3c9; is around an axis coplanar with and between the first and second axes.

Growing community of inventors

Matsumoto, Japan

Kenji Sato