Mitutoyo Corporation

Kenji Okabe

Tatsuya Nagahama

Sadayuki Matsumiya

Seiji Shimokawa

Nobuya Kaneko

Shunsaku Tachibana

Shigeru Ohtani

Toru Yaku

Taizo Nakamura

Yasushi Fukumoto

Kimitoshi Ono

Yoshiro Asano

Koji Kubo

Yu Sugai

Kenji Iwamoto

Gyokubu Cho

Masashi Kurokawa

Masaru Kawazoe

Takeshi Sawa

Hidekazu Sano

Masaki Okayasu

Yukiji Yoda

Kazuki Kitagawa

Shoichi Tanaka

Hiroshi Watabe

A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

Telecentric optical apparatus

An inclination adjusting mechanism includes a first member that is attachable to a connection portion of a lens unit that is connectable to a lens barrel; a second member that faces the first member and that is attachable to a connection portion of the lens barrel that is connectable to the lens unit; contact members that are fixed to the first member, that protrude from the first member toward the second member, and that contact the second member; and adjusting/fixing members that are capable of adjusting an inclination of the first member relative to the second member and capable of fixing the first member to the second member. The second member has an inclined surface that the contact members contact, and each of the contact members has a curved surface that contacts the inclined surface.

Inclination adjusting mechanism

A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.

Chromatic confocal sensor

A measurement system includes detachable parts, on which one filter module out of a plurality of filter modules including optical filters that each transmit different types of special light is detachably mounted, a specification part that specifies the optical filter of the one filter module mounted on the detachable parts, and a set value switching part that switches, according to the specified optical filter specified by the specification part, set values for adjustment used in a measurement using a specific optical filter.

Measurement system and method for switching set value for adjustment

Variable focal length lens

A light interference measuring device comprises: a light sourcethat outputs light; a beam splitterthat causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirrorthat is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter; a stagethat is arranged in the measurement optical path and that has the work W placed thereon; an imaging partthat images an image in which the combined wave is formed; a reference mirror adjustment mechanism () that adjusts a posture of the reference mirror; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirrorcorresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.

Light interference measuring device and program therefor

In an optical measuring device, the visual observation section includes: a white light source which emits white light; a first objective lens arranged between the white light source and measurement object, through which the white light emitted from the white light source and return light from the measurement object transmit; a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses to be arranged on the return light, and the special observation section includes: a special light source which emits special light; and a second objective lens arranged between the special light source and measurement object, through which the special light emitted from the special light source and return light from the measurement object transmit.

Optical measuring device

An autofocus device including: an optical source; an optical unit that allows emitted light from the optical source and object light from a measurement target to pass through the same optical path, the optical unit being arranged between the optical source and the measurement target; and a detection unit that performs focus detection by using the object light passed through the optical unit. The optical unit includes: a tube lens that forms the emitted light into parallel light; an image forming unit that forms a continuous line image on a surface of the measurement target; and a rotation unit that rotates the continuous line.

Autofocus device including line image forming unit and rotation unit that rotates line image

Microscope

An autofocus device includes an objective lens, an observation optical system, a driving mechanism that displaces the objective lens in an optical axis direction thereof, an illumination-optical-system optical path used to illuminate a measurement surface of a measurement object through the objective lens with light, and a pattern-projection-optical-system optical path. An electronic control shutter, a pattern projection plate having a predetermined pattern formed thereon, and a projection lens are provided in the pattern-projection-optical-system optical path.

Autofocus device with contrast enhancement

Disclosed a test management method for an indentation tester which includes a control section and forms an indentation on a surface of a heated or cooled sample by pressing an indenter to which a load is applied onto the surface of the sample, the test management method including the steps of: measuring a predetermined reference block as the sample under a plurality of temperature environments to obtain a test result; calculating a test error caused by temperature environment based on the test result by the control section; and judging whether or not the test error is within a predetermined range by the control section.

Test management method for indentation tester and indentation tester

A laser processing apparatus is provided with a first laser oscillator for laser CVD and a second laser oscillator for laser repair in a laser oscillation section. Either one of the first or second laser beam is irradiated by switching the first and second laser oscillators by a laser oscillator switch portion of a main body section. An optical path forming member is disposed such that the first or second laser beam, whichever is irradiated, will take the same optical path and reach a sample, after passing a common slit, to perform laser processing on the sample. Further, an objective lens is configured to be switched to an objective lens having a magnification corresponding to a wavelength of the laser beam irradiated from the laser oscillation section by an objective lens switch section of an objective lens section.

Laser processing apparatus

An objective lens used for a microscope includes a lens(es), an iris diaphragm and a tubular body. The lens(es),which is provided in a manner facing an object, transmits light reflected from a measuring surface of the object. The iris diaphragm, which is provided behind the lens(es), changes an aperture diameter of a light-transmissive aperture of a light-transmissive surface that is substantially orthogonal to a main optical axis of the light transmitted through the lens(es). The tubular body, which is detachably mounted on a revolving nosepiece of a trunk that includes a zoom imaging lens(es) for forming an image from the light transmitted through the light-transmissive aperture, holds the lens(es) and the iris diaphragm.

Growing community of inventors

Kawasaki, Japan

Kenji Okabe