Hitachi, Ltd.

Kenji Ohkubo

Takashi Naito

Hiroki Yamamoto

Seiji Miura

Seiichi Watanabe

Takuya Aoyagi

Takahiko Kato

Norihito Sakaguchi

Kazuki Aoshima

An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.

Electronic component provided with Cu&#x2014;Al&#x2014;Co-based alloy electrode or wiring

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Tabetsu, Japan

Kenji Ohkubo