Arkray, Inc.

Screen Holdings Co., Ltd.

Kenji Nakanishi

Shinya Nakajima

Shigeki Masuda

Koji Fujimoto

Yukio Watanabe

Kazutaka Taniguchi

Ryo Yamada

Yoshiyuki Nakazawa

Shigeru Takatsuji

Yoshio Furuya

Akira Horikoshi

Takahiro Kimura

Ryosuke Ito

Yayoi Takeichi

Miyoshi Ueno

Takaaki Yanagida

A substrate processing method includes: supplying a processing solution onto the upper surface of the substrate; executing, under atmospheric pressure, plasma processing on a liquid film of the processing solution that is formed at least in part of the upper surface of the substrate, with a thickness of the liquid film being a first thickness; and executing, under atmospheric pressure, plasma processing on the liquid film of the processing solution that is formed at least in part of the upper surface of the substrate, with the thickness of the liquid film being a second thickness, in which the first thickness is smaller than the second thickness. Thus, resists on the upper surface of the substrate can be efficiently removed.

Substrate processing method

An information processing device includes a categorizing section configured to extract a material component image identified as a material component from plural images obtained by imaging a sample fluid containing a plurality of types of material components and flowing through a flow cell, and to categorize the extracted material component image by predetermined category, a count derivation section configured to derive a count of the material component per standard visual field, or derive a count per unit liquid volume of the material component contained in the sample fluid, for each of the categories based on the number of material component images categorized by the categorizing section, and a generation section configured to generate an all-component image in which the material component images are arranged according to the counts that have been derived by the count derivation section for each of the categories.

Information processing device, information processing method, measurement system and non-transitory storage medium

An analysis apparatus comprises a flow cell which has a flow passage for a liquid containing a tangible component; an image pickupper which picks up images of the liquid flowing through the flow passage; an adjuster which adjusts a relative position of the flow cell with respect to the image pickupper in relation to an optical axis direction of the image pickupper and a direction in which the liquid flows through the flow passage; and a controller which determines an image pickup position of the flow cell in at least one of the optical axis direction and the direction in which the liquid flows, on the basis of a number of pieces of the tangible component in focusing states existing in the images of the liquid picked up by the image pickupper at a plurality of positions at which the relative position differs.

Analysis apparatus and focusing method

A plurality of images of a sample are simultaneously captured at different focal lengths by a plurality of cameras. An analysis apparatus includes: a branch section configured to cause light passing through the sample containing a material component to branch off into a plurality of optical paths; a plurality of imaging devices for simultaneously capturing images of the sample in a flow path at different focal points by using the light caused to branch off into the plurality of optical paths; and a controller configured to process the captured images.

Analysis apparatus

A drawing device draws a pattern on a substrate by radiating light from an optical head part on a target object (for example, substrate) which relatively moves with respect to the optical head part. Here, the optical head part has a spatial modulating unit which spatially modulates light from a light source, based on pattern data, and an optical path corrector which shifts the route of light spatially modulated in the spatial modulating unit at precision subdivided more than units of spatial modulation in the spatial modulating unit (more specifically, for example, units of pixels of spatial light modulator).

Drawing device and drawing method

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Kyoto, Japan

Kenji Nakanishi