Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Other (1 from 832,812 patents)
2. Tokyo Electron Limited (1 from 10,317 patents)
2 patents:
1. 6187060 - Sheet processing method
2. 5960562 - Processing apparatus of processing wafer sheets