Hitachi, Ltd.

Kenji Maruno

Masahiro Watanabe

Atsushi Taniguchi

Yuta Urano

Tatsuo Hariyama

Akio Yazaki

According to the present invention, a measured distance is corrected in accordance with change in the surrounding environment. A distance measurement system includes: a first light-receiving unit configured to irradiate an object with one part of a split light beam as assessment light, and receive light reflected by the object to detect a target assessment beat signal; a second light-receiving unit configured to guide the other part of the split light beam as reference light to a reference optical path serving as a distance reference, and receive the reference light that has passed through the reference optical path to detect a reference optical path assessment beat signal; a distance measurement unit configured to measure a distance to the object on the basis of the target assessment beat signal and the reference optical path assessment beat signal; a temperature sensor configured to assess a temperature in the periphery of the reference optical path; and a correction unit configured to correct the measured distance on the basis of the assessed temperature.

Distance measurement system and distance measurement method

A distance measuring device includes a light emitting unit that outputs a measurement light, a first polarization state control unit that controls a polarization state of the measurement light output from the light emitting unit, a second polarization state control unit that controls the polarization state of the measurement light of which a polarization state is controlled by the first polarization state control unit, and an optical path switching element that selects an emission direction of the measurement light of which a polarization state is controlled by the second polarization state control unit, in which the second polarization state control unit controls the polarization state of the measurement light so that the measurement lights are emitted from the optical path switching element in a plurality of the emission directions, and the optical path switching element receives a reflected light obtained by reflecting the emitted measurement light by an object.

Distance measuring device, distance measuring method, and three-dimensional shape measuring apparatus

A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis of the reflected light; and a control device for analyzing the distance detection waveform and calculating a measured distance value to the object. The shape measurement system is characterized in that the control device calculates a feature amount of the distance detection waveform and performs at least one of a process of correcting an error in the measured distance value by substituting the feature amount into a correction formula and a process of performing a confidence weighting of an error in the measured distance value by substituting the feature amount into a confidence weighting formula.

Shape measuring system and shape measuring method

Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip, and a processor. The probe tip includes an optical element that is configured to irradiate an object with measurement light and a cylindrical unit that is configured to lock the optical element. The processor is configured to calculate an optical path length from the optical element to an object based on reflected light of the measurement light with which the object is irradiated; and calculate a three-dimensional shape of the object based on the input information and the optical path length.

Shape measurement system, probe tip unit, and shape measurement method

Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip unit, and a calculation unit. The probe tip unit includes an optical element that is configured to irradiate an object with measurement light, a fixing mechanism that is configured to fix to the measurement probe so as to be detachable and replaceable, and a cylindrical unit that is configured to lock the optical element and is provided with the fixing mechanism.

An object is to provide a technology capable of realizing miniaturizing of a measurement unit in a distance measuring device. The distance measuring device including a light emitting unit that outputs measurement light, a polarization state control unit that controls polarization of the measurement light output from the light emitting unit, and an optical path switching element that selectively emits the measurement light controlled by the polarization state control unit, in which the polarization state control unit controls the polarization so as to emit the measurement light in a plurality of directions from the optical path switching element, and the optical path switching element receives reflected light with respect to an object of the measurement light emitted from the optical path switching element, the reflected light being used to measure a distance to the object.

Growing community of inventors

Tokyo, Japan

Kenji Maruno