Denso Corporation

Fuji Electric Co., Ltd.

Kenji Kouno

Hiromitsu Tanabe

Yukio Tsuzuki

Souichi Yoshida

Seiji Noguchi

Tetsuo Fujii

Hitoshi Abe

Seiji Momota

Hiroshi Miyata

Yoshihiko Ozeki

Yasushi Okura

Shinji Amano

Norihito Tokura

Tomofusa Shiga

Masaki Tamura

Shouji Mizuno

Ruichiro Abe

A semiconductor device includes a source electrode, a drain electrode and a gate. The gate controls a current flowing between the source electrode and the drain electrode. Capacitance between the gate and the drain electrode is first capacitance. Capacitance between the gate and the source electrode is second capacitance. A sum of the first capacitance and the second capacitance is equal to third capacitance. Total switching loss is a sum of first switching loss and second switching loss. The first switching loss is defined by a current variation rate, and the second switching loss is defined by a voltage variation rate. A capacitance ratio of the first capacitance to the third capacitance is set to a ratio to satisfying a relationship that the total switching loss is smaller than a predetermined value.

Semiconductor device

A plug electrode is subject to etch back to remain in a contact hole and expose a barrier metal on a top surface of an interlayer insulating film. The barrier metal is subject to etch back, exposing the top surface of the interlayer insulating film. Remaining element structures are formed. After lifetime is controlled by irradiation of helium or an electron beam, hydrogen annealing is performed. During the hydrogen annealing, the barrier metal is not present on the interlayer insulating film covering a gate electrode, enabling hydrogen atoms to reach a mesa part, whereby lattice defects generated in the mesa part by the irradiation of helium or an electron beam are recovered, recovering the gate threshold voltage. Thus, predetermined characteristics of a semiconductor device having a structure where a plug electrode is provided in a contact hole, via barrier metal are easily and stably obtained when lifetime control is performed.

Semiconductor device and method of manufacturing semiconductor device

On a front surface side of an nsemiconductor substrate, an emitter electrode and trench gates each including a p base layer, a trench, a gate oxide film and a gate electrode are provided in an IGBT region and a FWD region. Among p base layers each between adjacent trenches, p base layers having an nemitter region are the IGBT emitter region and the p base layers not having the nemitter region are the FWD anode region. A lateral width of an ncathode region is narrower than a lateral width of the FWD anode region. A difference of a lateral width of the FWD anode region and a lateral width of the ncathode region is 50 &#x3bc;m or more. Thus, a semiconductor device may be provided that reduces the forward voltage drop while suppressing waveform oscillation during reverse recovery and having soft recover characteristics.

Semiconductor device with an insulated-gate bipolar transistor region and a diode region

A method of manufacturing a semiconductor device having an insulated gate bipolar transistor portion and a freewheeling diode portion. The method includes introducing an impurity to a rear surface of a semiconductor substrate, performing first heat treating to activate the impurity to form a field stop layer, performing a first irradiation to irradiate light ions from the rear surface of semiconductor substrate to form, in the semiconductor substrate, a first low-lifetime region, performing a second irradiation to irradiate the light ions from the rear surface of the semiconductor substrate to form, in the field stop layer, a second low-lifetime region, and performing second heat treating to reduce a density of defects generated in the field stop layer when the second irradiation is performed. Each of the first and second low-lifetime regions has a carrier lifetime thereof shorter than that of any region of the semiconductor device other than the first and second low-lifetime regions.

The present disclosure provides a semiconductor chip. The semiconductor chip includes a switching element having a gate electrode, a first pad, and a second pad. The first control pad is electrically connected to the gate electrode and applied with a voltage controlling the switching element to switch on or switch off. The second control pad provides a current path of a control current flowing between the first control pad and the second control pad when the switching element is in a switch-on state. One of the first control pad or the second control pad includes two pad components and a remaining one of the first control pad or the second control pad is disposed between the two pad components of the one of the first control pad or the second control pad.

Semiconductor chip having multiple pads and semiconductor module including the same

A semiconductor device includes a semiconductor substrate provided with an IGBT cell having a collector region and a diode cell having a cathode region, a first defect layer and a second defect layer in a drift region. A region present in the drift region and surrounded by an interface between the IGBT cell and the diode cell orthogonal to a first principal plane, and a plane passing through a boundary between the collector region and the cathode region on a boundary line along an interface between the collector region and the drift region and crossing the first principal plane at an angle of 45 degrees is referred to as a boundary region. The diode cell satisfies a relationship of S&#x3e;S, in which S is an area occupied by the boundary region and Sis an area occupied by the diode cell in a surface of the drift region.

A semiconductor device has a semiconductor substrate including a first conductivity-type drift layer, a second conductivity-type base layer disposed in a surface layer portion of the drift layer, and a second conductivity-type collector layer and a first conductivity-type cathode layer disposed opposite to the base layer with respect to the drift layer. In the semiconductor substrate, an IGBT region and a diode region are alternately and repetitively arranged. The IGBT region and the diode region are divided by a boundary between the collector layer and the cathode layer. The collector layer is defined as a first collector layer. The semiconductor device includes a second collector layer having a second conductivity-type impurity concentration higher than that of the first collector layer, at a surface of the semiconductor substrate adjacent to the first collector layer and the cathode layer.

A semiconductor device includes a semiconductor substrate having a drift layer, a base layer, a collector layer and a cathode layer. The semiconductor substrate includes a cell region and an outer peripheral region surrounding the cell region. The cell region includes an IGBT region and a diode region. The semiconductor substrate further includes a damage region arranged in the diode region and a part of the outer peripheral region adjacent to a boundary between the outer peripheral region and the diode region. A length, in a longitudinal direction of the diode region, of the part of the outer peripheral region, in which the damage region is arranged, is equal to or more than twice of a thickness of the semiconductor substrate. As a result, recovery characteristic is improved in a portion of the diode region adjacent to the boundary between the outer peripheral region and the diode region.

A semiconductor device includes a semiconductor substrate with: a drift layer; a base layer; and a collector layer and a cathode layer. In the semiconductor substrate, when a region operating as an IGBT device is an IGBT region and a region operating as a diode device is a diode region, the IGBT and diode regions are arranged alternately in a repetitive manner; a damaged region is arranged on a surface portion of the diode region in the semiconductor substrate. The IGBT and diode regions are demarcated by a boundary between the collector and cathode layers; and a surface portion of the IGBT region includes: a portion having the damaged region at a boundary side with the diode region; and another portion without the damaged region arranged closer to an inner periphery side relative to the boundary side.

A semiconductor device that includes a plurality of trench gate structures each having a gate electrode extending in a depth direction of an element, the plurality of trench gate structures including first trench gate structures respectively contributing to control of the element and second trench gate structures respectively not contributing to the control of the element, the semiconductor device including an electrode portion having a potential other than a gate potential, and an electrode pad that is disposed on a front face of a semiconductor substrate, wherein the electrode pad is used as a terminal to apply a predetermined voltage to gate insulator films, in screening that is executed by applying the predetermined voltage to the gate insulator films respectively in contact with the gate electrode connected to the electrode pad and that is executed before the electrode pad is short-circuited to the electrode portion.

A semiconductor device includes: a diode-integrated IGBT element in a same semiconductor substrate having a diode element and an IGBT element driven by a drive signal towards a gate; a sense element having a diode sense element with a current proportional to a current through the diode element and an IGBT sense element with a current proportional to a current through the IGBT element; a switch element connected to a first current pathway through the diode sense element and to a second current pathway different from the first current pathway. The switch element is turned off to control the second current pathway to be discontinuous with the first current pathway when no current flows through the diode sense element, and is turned on to control the second current pathway to be continuous with the first current pathway and apply a current when a current flows through the diode sense element.

A semiconductor device includes: a semiconductor chip having a switching element and multiple pads electrically connected to the switching element; and multiple lead terminals electrically connected to the respective pads. The multiple lead terminals include a control terminal used for control of on/off operation of the switching element, and a main terminal into which a main current flows when the switching element is in an on state. A coupling coefficient k falls within a range of &#x2212;3%&#x2266;k&#x2266;2%, where the coupling coefficient k is defined by a parasitic inductance Lg in a current path of a control current flowing in the control terminal, a parasitic inductance Lo in a current path of the main current, and a mutual inductance Ms of the parasitic inductances Lg and Lo.

A fabrication method of a semiconductor device that includes trench gate structures each having a gate electrode extending in a depth-direction of an element, where first trench gate structures contribute to controlling the element and second trench gate structures do not contribute. The fabrication method includes forming the trench gate structures on a front face of a semiconductor substrate; forming on the front face, an electrode pad connected to the gate electrode of at least one trench gate structure; executing screening by applying a predetermined voltage between the electrode pad and an electrode portion having a potential other than a gate potential, to apply the predetermined voltage to gate insulator films in contact with each gate electrode connected to the electrode pad; and forming the second trench gate structures having the gate electrodes connected to the electrode pad, by short-circuiting the electrode portion to the electrode pad after executing screening.

Fabrication method of semiconductor device, evaluation method of semiconductor device, and semiconductor device

In a semiconductor device including an IGBT and a freewheeling diode W&#x2267;2&#xd7;L1/K, where K&#x2267;2.5, W denotes a distance between the divided first regions, L1 denotes a thickness of the drift layer, k1 denotes a parameter that depends on structures of the insulated gate bipolar transistor and the freewheeling diode, and K denotes a value calculated by multiplying the parameter k1 by a ratio of a snapback voltage to a built-in potential between the deep well layer and the drift layer.

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Gifu, Japan

Kenji Kouno