Kanto Denka Kogyo Co., Ltd.

Kenji Kawahara

Yukinobu Shibusawa

Hiroki Takizawa

Daichi Hanitani

The present invention provides a method of producing high-purity molybdenum hexafluoride in good yield and a reaction apparatus therefor. The method of producing molybdenum hexafluoride in a production apparatus for molybdenum hexafluoride, which production apparatus includes a fixed bed that is for mounting metallic molybdenum and that extends inside a reactor from an upstream side to a downstream side of the reactor, a fluorine (F) gas inlet provided on the upstream side of the reactor, and a reaction product gas outlet provided on the downstream side of the reactor, comprises bringing metallic molybdenum into contact with fluorine (F) gas, where the fixed bed for mounting metallic molybdenum is tilted.

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Shibukawa, Japan

Kenji Kawahara