Nippon Tungsten Co., Ltd.

Tokyo Electron Limited

Ebara Corporation

Kenji Fujimoto

Nobuyuki Nagayama

Takahiro Murakami

Naoyuki Satoh

Koichi Murakami

Takashi Ikeda

Hajime Ishii

Norio Takahashi

Hiroshi Yakuwa

Nobuaki Ito

Kenichi Sugiyama

Makoto Komiya

Provided is a member for a plasma processing apparatus consisting of a tungsten carbide phase. The member includes at least one type of atom selected from the group consisting of a Fe atom, a Co atom, and a Ni atom, in which the total content of the atoms is in a range of 30 to 3300 atomic ppm.

Member for plasma processing apparatus and plasma processing apparatus with the same

A member for a plasma processing apparatus has a tungsten carbide phase, and a sub-phase including at least one selected from the group consisting of phase I to IV, and phase V, in which the phase I is a carbide phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase II is a nitride phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase III is a carbonitride phase containing, as a constituent element, at least one of the elements of Group IV, Group V, and Group VI of the periodic table excluding W, the phase IV is a carbon phase, the phase V is a composite carbide phase which is represented by a formula WMC.

Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body

Provided is a TiC&#x2014;(Ti&#x2014;Mo) sliding material having a binder phase made of a Ti&#x2014;Mo alloy, and a hard phase containing TiC, wherein the TiC&#x2014;(Ti&#x2014;Mo) sliding material satisfies all the following conditions: (1) a total area of the binder phase and the hard phase is 90% or more of an area of a field of view; (2) a total area of the binder phase is 15% or more and 20% or less of the area of the field of view; (3) in the binder phase, a total area of the binder phase having a diameter equivalent to 10 &#x3bc;m or more and 50 &#x3bc;m or less; (4) in the binder phase, a total area of the binder phase having a diameter equivalent to less than 10 &#x3bc;m; and (5) a Mo concentration in the binder phase is 25 wt % or more and 35 wt % or less.

Sliding material, shaft sleeve, and pump provided with shaft sleeve

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Fukuoka, Japan

Kenji Fujimoto