Fujikin Inc.

Kenji Aikawa

Takahiro Matsuda

Tsutomu Shinohara

Tomohiro Nakata

Kazunari Watanabe

Akihiro Harada

Kohei Shigyou

Ryutaro Tanno

Yuya Suzuki

Toshiyuki Inada

Masahiko Ochiishi

Katsunori Komehana

Hajime Nakagawa

Yuta Motegi

Kouji Nishino

Masaaki Nagase

Kaoru Hirata

Toshihide Yoshida

Masahiko Takimoto

Kenta Kondo

Hidenobu Sato

Takahiro Imai

Haruhiko Kuriki

Tetsuo Naritomi

To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve Vcapable of detecting an operation abnormality has a magnet Mthat is attached in the vicinity of a pressing adapterof a stemthat slides according to an opening/closing operation of the valve V, and a magnetic sensor Mthat is attached to a surface acing the stem, inside the pressing adapterthat presses a peripheral edge of a diaphragm, and detects a change in a distance between the magnet Mand the magnetic sensor M. Further, an abnormality determination mechanism compares the change in the distance between the magnet Mand the magnetic sensor Mat the time of abnormality diagnosis detected by the magnetic sensor Mand a previously measured change in the distance between the magnet M and the magnetic sensor Mat the time of normality, and determines whether or not there is an abnormality.

Valve, abnormality diagnosis method of valve

A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.

Fluid control device, joint block and manufacturing method for fluid control device

A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Flow-path forming block and fluid control device provided with flow-path forming block

A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Fluid control device and manufacturing method for the fluid control device

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.

Fluid control device and semiconductor manufacturing apparatus

A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.

A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.

Fluid supply system, fluid control device, and semiconductor manufacturing device

To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V, and Vcommunicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V, and a valve V; a pressure adjustment step of setting a part or all of flow passages Rand Rleading from the valve Vto the valve Vvia the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms Pand P; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms Pand Pand pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

Abnormality diagnosis method of fluid supply line

The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

Valve device

A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.

Valve device and fluid control device

The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve bodyand a driving pressure control devicecoupled to the valve body. The driving pressure control deviceincludes: a driving pressure introduction pathconnected to a driving pressure supply source G outside a line; an automatic valvethat opens and closes the driving pressure introduction path; a driving pressure introduction paththat couples to a driving pressure introduction portof the valve body; an automatic valvethat opens and closes the driving pressure introduction pathin conjunction with the automatic valveand opens and closes an exhaust passagethat discharges a driving pressure from the driving pressure introduction path; and a driving pressure introduction paththat couples the driving pressure introduction pathand the driving pressure introduction pathvia the automatic valveand the automatic valve

Valve and fluid supply line

A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.

A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

Growing community of inventors

Osaka, Japan

Kenji Aikawa