Mitsubishi Denki Kabushiki Kaisha

Kenichiro Shiozawa

Moriaki Akazawa

Takeshi Matsunuma

Katsunobu Hori

A semiconductor device having a capacitor and a method of manufacturing thereof are provided, securing a certain capacitance while allowing the size to be reduced. The semiconductor device includes a capacitor lower electrode having an upper surface and including a metal film, a dielectric film deposited on the upper surface of the capacitor lower electrode and having its thickness smaller than that of the capacitor lower electrode, and a capacitor upper electrode deposited on the dielectric film, having its width smaller than that of the capacitor lower electrode and including a metal film.

Growing community of inventors

Hyogo, Japan

Kenichiro Shiozawa