Keyence Corporation

Kenichiro Hirose

Ryosuke Imai

Ryosuke Kondo

Hayato Ohba

A change in a substance in a depth direction of an analyte is easily estimated. An analysis and observation device includes: a library holding section that holds a substance library in which a substance is associated with a type of an element constituting the substance and a content of the element; and a component analysis section that estimates a type of an element constituting a substance and a content of the element based on a spectrum, and estimates the substance based on estimated characteristics and the substance library. The component analysis section estimates a type of an element constituting a substance, a content of the element, and the substance at each of a plurality of positions having different analysis depths.

Laser-induced breakdown spectroscope

An analysis and observation device includes: an electromagnetic wave emitter that emits a primary electromagnetic wave; a reflective object lens having a primary mirror provided with a primary reflection surface reflecting a secondary electromagnetic wave and a secondary mirror provided with a secondary reflection surface receiving and further reflecting the secondary electromagnetic wave; first and second detectors that receive the secondary electromagnetic wave and generate an intensity distribution spectrum; and a controller that performs component analysis of a sample based on the intensity distribution spectrum. A transmissive region through which the primary electromagnetic wave is transmitted is provided at a center of the secondary mirror. The transmissive region transmits the primary electromagnetic wave, which has been emitted from the electromagnetic wave emitter and passed through an opening of the primary mirror, thereby emitting the primary electromagnetic wave along an analysis optical axis of the reflective object lens.

Analysis device

It is possible to save time and effort required for imaging of an analysis point and to improve usability of an analysis device. An analysis and observation device as a laser-induced breakdown spectroscope includes: a first camera, an electromagnetic wave emitter that emits laser light to a sample; a reflective object lens that collects plasma light generated in the sample; first and second detectors that generate intensity distribution spectra; and a processor. The processor controls the first camera in response to reception of a start trigger signal to generate a pre-irradiation image that is an image before the sample is irradiated with the laser light, and controls the electromagnetic wave emitter after controlling the first camera to emit the laser light to the sample.

Growing community of inventors

Osaka, Japan

Kenichiro Hirose