Phoenix Electric Co., Ltd.

Kenichi Yamashita

Tetsuya Gouda

Tomohiko Inoue

Tomihiko Ikeda

Kana Watanabe

Hiromu Matsumoto

A light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration is provided. The light irradiation device is configured using a light source with a plurality of LEDs, and a polarizing element that receives light from the light source and applies the light transmitted through the polarizing element to a workpiece. An optical axis of each of the LEDs is set in such a manner as to have a first angle θto the workpiece. A second angle θas an angle half of a light distribution angle of the light emitted from each of the LEDs is set smaller than the first angle θ

Light irradiation device, and exposure apparatus provided therewith

An infrared lampis composed of an LEDthat emits infrared light and a cut filterthat transmits a part of the light from the LED. And a peak wavelength of the light emitted from the LEDin the lighting starting stage is set to be shorter than a cut-on wavelength of the cut filter

Infrared lamp having cut filter cut-on wavelength between starting stage peak wavelength and steady state peak wavelength

A light emitting diode lamp is composed of a light emitting diode, a band-pass filter and a light angle adjuster. The filter has a light cutoff function to cut off a light ray with a specific wavelength. The light angle adjuster allows the light rays emitted from the diode to be incident on the filter at incident angles of less than or equal to a maximum incident angle up to which the filter is capable of exerting the light cutoff function. The light angle adjuster is a reflector. The diode is mounted to a bottom portion. The filter is mounted to an opening. On an imaginary cross section including the optical axis, an angle formed between the optical axis and a straight line is less than or equal to the maximum incident angle, the straight line connects the emission center and an edge of the opening.

LED lamp

A light emitting diode lamp is composed of a reflective mirror, a pillar and a plurality of light emitters disposed in radial arrangement about a focal point of the reflective mirror on the surface of the pillar. Each of the plurality of light emitters is composed of a light emitting diode and a lens forming a virtual image in a position of the focal point located behind the light emitting diode. Additionally, a plurality of light emitting diode elements composing the light emitting diode in each of the plurality of light emitters emit light rays with the same wavelength, and the light emitting diodes in the plurality of light emitters emit the light rays with at least two types of wavelength.

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Himeji, Japan

Kenichi Yamashita